Synthesis and characterization of nanoscale Al-Si-O gradient membranes

Journal Article · Sun Jul 15 00:00:00 EDT 2007 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2731342· OSTI ID:20979507

Trouillet, V; Troesse, H; Bruns, M; Nold, E; White, R G ^[1]

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1. Forschungszentrum Karlsruhe GmbH, Institut fuer Materialforschung III, D-76344 Eggenstein-Leopoldshafen (Germany)

Novel ultrathin gas-permeable Al-Si-oxide membranes have been developed by means of ion induced chemical vapor deposition in order to improve the gas analytical performance of an electronic nose. Dependent on the used precursor tailored Al/Si concentration ratios and even concentration gradients are attainable. The diversity in chemical composition and thickness across the gas sensor microarray has been proven by the combination of ellipsometry for the freshly prepared membrane and line scans derived from Auger electron spectroscopy and angle resolved x-ray photoelectron spectroscopy, respectively, for the baked membrane.

• OSTI ID: 20979507
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 25, Issue 4; Other Information: DOI: 10.1116/1.2731342; (c) 2007 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM COMPOUNDS
AUGER ELECTRON SPECTROSCOPY
CHEMICAL COMPOSITION
CHEMICAL VAPOR DEPOSITION
CONCENTRATION RATIO
ELLIPSOMETRY
IONS
MEMBRANES
NANOSTRUCTURES
OXIDES
SILICON COMPOUNDS
SYNTHESIS
THICKNESS
X-RAY PHOTOELECTRON SPECTROSCOPY