Combined filtered cathodic arc etching pretreatment-magnetron sputter deposition of highly adherent CrN films

Journal Article · Tue May 15 04:00:00 EDT 2007 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2730512· OSTI ID:20979371

Ehiasarian, A P; Anders, A; Petrov, I ^[1]

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1. Materials and Engineering Research Institute, Sheffield Hallam University, Howard St., Sheffield S1 1WB (United Kingdom)

CrN films were prepared on steel substrates by a hybrid method utilizing filtered cathodic arc for Cr ion pretreatment and magnetron sputtering for coating deposition. During pretreatment the substrates were biased to -1200 V and exposed to filtered chromium plasma. The substrate-coating interface formed during the pretreatment contained a Cr-enriched modified layer with composition that was strongly influenced by the temperature of the substrate as observed by scanning transmission electron microscopy--energy dispersive spectroscopy. The modified layer had a nanocrystalline morphology and thickness of 15 nm. The path of formation of the layer is linked to the combined action of implantation, diffusion, and resputtering. The resulting adhesion of 3 {mu}m thick CrN films was very high with scratch test critical load values of 83 N. The morphology of the films was smooth without large scale defects and the microstructure was columnar. The coatings behaved well in dry sliding tests with very low wear coefficients of 2.3x10{sup -16} m{sup 3} N{sup -1} m{sup -1}, which can be linked to the high adhesion and defect-free microstructure. The smooth coatings also had a high resistance to corrosion as demonstrated by potentiodynamic tests with particularly high pitting potentials of +800 mV.

• OSTI ID: 20979371
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 3 Vol. 25; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESION
CHROMIUM
CHROMIUM IONS
CHROMIUM NITRIDES
CORROSION RESISTANCE
CRYSTAL STRUCTURE
ETCHING
FILMS
LAYERS
MICROSTRUCTURE
MORPHOLOGY
NANOSTRUCTURES
SCANNING ELECTRON MICROSCOPY
SPUTTERING
STEELS
SUBSTRATES
SURFACE COATING
THICKNESS
TRANSMISSION ELECTRON MICROSCOPY