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Self-consistent approach to x-ray reflection from rough surfaces

Journal Article · · Physical Review. B, Condensed Matter and Materials Physics
;  [1];  [2]
  1. Department of Theoretical Physics, Belarusian State University, 4 Fr. Skariny Avenue, 220080 Minsk (Belarus)
  2. Bruker AXS, Oestl.Rheinbrueckenstrasse 49, 76187 Karlsruhe (Germany)

A self-consistent analytical approach for specular x-ray reflection from interfaces with transition layers [I. D. Feranchuk et al., Phys. Rev. B 67, 235417 (2003)] based on the distorted-wave Born approximation (DWBA) is used for the description of coherent and incoherent x-ray scattering from rough surfaces and interfaces. This approach takes into account the transformation of the modeling transition layer profile at the interface, which is caused by roughness correlations. The reflection coefficients for each DWBA order are directly calculated without phenomenological assumptions on their exponential decay at large scattering angles. Various regions of scattering angles are discussed, which show qualitatively different dependence of the reflection coefficient on the scattering angle. The experimental data are analyzed using the method developed.

OSTI ID:
20976716
Journal Information:
Physical Review. B, Condensed Matter and Materials Physics, Journal Name: Physical Review. B, Condensed Matter and Materials Physics Journal Issue: 8 Vol. 75; ISSN 1098-0121
Country of Publication:
United States
Language:
English

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