Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

Journal Article · Mon May 14 04:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2735934· OSTI ID:20971926

Barnat, E V; Miller, P A; Hebner, G A; Paterson, A M; Panagopoulos, Theodoros; Hammond, Edward; Holland, J ^[1]

---

1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1423 (United States)

The radial distribution of the measured voltage drop across a sheath formed between a 300 mm electrode and an argon plasma discharge is shown to depend on the excitation radio frequency, under constant power and pressure conditions. At a lower frequency of 13.56 MHz, the voltage drop across the sheath is uniform across the 300 mm electrode, while at higher frequencies of 60 and 162 MHz the voltage drop becomes radially nonuniform. The magnitude and spatial extent of the nonuniformity become greater with increasing frequency.

• OSTI ID: 20971926
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 20 Vol. 90; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ELECTRIC POTENTIAL
ELECTRODES
HIGH-FREQUENCY DISCHARGES
MHZ RANGE 01-100
PLASMA
PLASMA DIAGNOSTICS
PLASMA SHEATH
RADIOWAVE RADIATION
SPATIAL DISTRIBUTION
VOLTAGE DROP