Ion energy uniformity in high-frequency capacitive discharges

Journal Article · Mon Jan 10 04:00:00 EST 2005 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1848183· OSTI ID:20636925

Perret, A; Chabert, P; Jolly, J; Booth, J -P ^[1]

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1. Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, 91128, Palaiseau Cedex (France)

Ion energy distribution functions and ion fluxes in low-pressure, high-frequency (13.56-80 MHz) capacitive discharges were investigated both theoretically and experimentally. In most of the conditions explored, the ion energy distribution function was a single peak centered at the time-averaged plasma potential. Lower energy ions with higher fluxes are obtained as the frequency increases. The uniformity of the ion energy across large-area electrodes (40 cm{sup 2}) was also studied in conditions under which the standing wave effect is important, i.e., conditions such that the rf voltage and the ion flux are strongly nonuniform. Unlike the latter quantities, the ion energy was uniform across the reactor at all frequencies, due to dc current flowing radially in the plasma and in the electrodes.

• OSTI ID: 20636925
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 2 Vol. 86; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRODES
ENERGY SPECTRA
HIGH-FREQUENCY DISCHARGES
MHZ RANGE 01-100
PLASMA
PLASMA INSTABILITY
PLASMA POTENTIAL
PLASMA SIMULATION
PLASMA WAVES
STANDING WAVES