Atmospheric-pressure argon/oxygen plasma-discharge source with a stepped electrode

Journal Article · Sun Jan 28 23:00:00 EST 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2450654· OSTI ID:20971798

Lim, Jin-Pyo; Uhm, Han S; Shouzhe, Li ^[1]

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1. Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)

The nonequilibrium glow discharge in argon mixed with oxygen at atmospheric pressure was generated in a parallel plate reactor with a stepped electrode powered by a 13.56 MHz radio-frequency power supplier. The stepped-electrode reactor consists of a narrow and wide gap structure. A strong electric field occurred at the narrow gap region preionizes Ar/O{sub 2} gas and assists to generate a large volumetric plasma in the wide gap region. Therefore, the stepped-electrode reactor makes it easy to operate Ar/O{sub 2} glow discharge, providing a stable, uniform, and broad plasma jet at atmospheric pressure.

• OSTI ID: 20971798
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 5 Vol. 90; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ATMOSPHERIC PRESSURE
ELECTRIC FIELDS
ELECTRODES
GLOW DISCHARGES
IONIZATION
MHZ RANGE 01-100
OXYGEN
PLASMA
PLASMA JETS
RADIOWAVE RADIATION