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High-mobility two-dimensional electron gas in InAlAs/InAs heterostructures grown on virtual InAs substrates by molecular-beam epitaxy

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2430403· OSTI ID:20883252
; ; ; ;  [1]
  1. Department of Electrical and Computer Engineering, Ohio State University, Columbus, Ohio 43210 (United States)

In{sub 0.8}Al{sub 0.2}As/InAs heterostructures were grown on virtual InAs substrates consisting of a relaxed InAs{sub y}P{sub 1-y} step-graded buffer grown on InP by molecular-beam epitaxy. Hall measurements revealed the presence of a high-mobility two-dimensional electron gas within the relaxed InAs layer, with a peak electron mobility of 133 000 cm{sup 2}/V s at 25 K. In contrast, identical InAlAs/InAs heterostructures grown directly on InAs buffers on InP showed only bulk transport characteristics. A combination of transport modeling and electron microscopy demonstrates that reduced dislocation scattering in the channel region is responsible for observing the two-dimensional transport within the relaxed InAs on graded InAsP. These results demonstrate the potential of achieving ultrahigh-speed InAs based high electron mobility transistors using relaxed, virtual InAs substrates on InP.

OSTI ID:
20883252
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 90; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English