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Helium mass spectrometer leak testing for NDT applications

Conference ·
OSTI ID:207984
 [1]
  1. Varian Vacuum Products, Lexington, MA (United States)

Leak-testing with mass spectrometer helium leak detectors has been widely applied to vacuum and pressurized process vessels, hermetically-sealed parts, and to gas distribution systems. By using this technique, leaks as small as 1 0{sup {minus}10} atm cc/sec and lower can be detected with readily available equipment. The need to perform leak testing is primarily driven by the requirements of end product specifications, process safety, and environmental requirements. Helium is an ideal choice as a tracer gas due to its small molecular size and high permeability through leaks. It is also low in cost, has a low background abundance in air, and is chemically inert and safe.

OSTI ID:
207984
Report Number(s):
CONF-9510265--; ISBN 1-57117-013-8
Country of Publication:
United States
Language:
English

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