Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes
- Electrical and Computer Engineering Department, National University of Singapore, co4 Engineering Drive 3, Singapore 117576 (Singapore)
At present transmission electron energy loss spectrum (EELS) analysis is only carried out in dedicated research instruments such as transmission electron microscopes (TEMs) or scanning transmission electron microscopes. This article presents a new design of second-order geometric aberration corrected EELS spectrometer attachment using split plates, which enables conventional scanning electron microscopes (SEMs) to provide TEM-like EELS spectra. Correction to a third-order dominant geometric aberration pattern has been achieved, which indicates that most of the second-order geometric aberration component is eliminated. This second-order aberration corrected spectrometer attachment design can enable SEMs to provide transmission EELS spectrums.
- OSTI ID:
- 20779186
- Journal Information:
- Review of Scientific Instruments, Vol. 77, Issue 4; Other Information: DOI: 10.1063/1.2190208; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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