On An RF Discharge With An Adaptive Electrode For Powder Treatment

Journal Article · Mon Oct 31 04:00:00 EST 2005 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2134652· OSTI ID:20726803

Thieme, G; Tatanova, M; Bojic, D; Basner, R; Kersten, H ^[1]

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1. Institute of Non-thermal Plasma Physics (INP) Greifswald, F.-L.-Jahn-Str. 19, D-17489 Greifswald (Germany)

The plasma near an adaptive electrode of an asymmetric capacitively coupled RF discharge (13.56 MHz) in argon for powder treatment was studied at different pressures and RF powers. The plasma parameters as electron density, electron temperature, and plasma potential were determined by means of Langmuir probe measurements. The different ions and their kinetic energy at the wall were measured by energy resolved mass spectrometry. The influence of biased segments on the plasma, on the positioning of melamin formaldehyde (MF) particles, and on their vertical resonance frequency was investigated.

• OSTI ID: 20726803
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 799; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ASYMMETRY
ELECTRODES
ELECTRON DENSITY
ELECTRON TEMPERATURE
FORMALDEHYDE
HIGH-FREQUENCY DISCHARGES
IONS
KINETIC ENERGY
LANGMUIR PROBE
MASS SPECTROSCOPY
MHZ RANGE
PLASMA
PLASMA DIAGNOSTICS
PLASMA POTENTIAL
PLASMA SHEATH
POWDERS
RESONANCE