Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method
- Japan Synchrotron Radiation Research Institute/SPring-8, 1-1-1 Kouto, Mikazuki, Sayo, Hyogo 679-5198 (Japan)
Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction x110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.
- OSTI ID:
- 20723136
- Journal Information:
- Review of Scientific Instruments, Vol. 76, Issue 9; Other Information: DOI: 10.1063/1.2052595; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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