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Title: DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L

Abstract

Thin stainless steel films were prepared on SiO2/Si plate heated at 100 deg. C and 400 deg. C using AISI316L as target, by a RF magnetron Ar sputtering method. RF sputtered-deposited films and the oxidized surface layers by post heating were characterized by depth selective conversion electron Moessbauer spectroscopy (DCEMS) using a He+5%CH4 gas proportional counter. The as-deposited films consisted of magnetic phases, the magnetic orientation of which had a tendency to be perpendicular to the surface of the film. In the case of the deposited films at substrate temperature of 100 deg. C, a small amount of Fe2O3 and ferritic stainless steel formed by post-heating in air. A magnetic subcomponent and a austenite phase were formed in the films deposited at substrate temperature of 400 deg. C. {alpha}-Fe2O3 and magnetite formed easily on the top and middle layers of the films by post-heating in air. The oxide states of the films deposited at different temperatures of substrate were clearly distinguished by post-heating. Thus it was found by DCEMS that the structures of the deposited films were strongly affected by the preparation method and the temperature of the substrate.

Authors:
; ; ;  [1]
  1. School of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656 (Japan)
Publication Date:
OSTI Identifier:
20722124
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 765; Journal Issue: 1; Conference: International symposium on the industrial applications of the Moessbauer effect, Madrid (Spain), 4-8 Oct 2004; Other Information: DOI: 10.1063/1.1923642; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AIR; ANNEALING; AUSTENITE; DEPOSITION; ELECTRON SPECTROSCOPY; FERRITIC STEELS; HELIUM; IRON OXIDES; MAGNETITE; METHANE; MOESSBAUER EFFECT; PROPORTIONAL COUNTERS; SPUTTERING; STAINLESS STEELS; SUBSTRATES; SURFACES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; TEMPERATURE RANGE 0400-1000 K; THIN FILMS

Citation Formats

Nomura, K., Iio, S., Ujihira, Y., and Terai, T.. DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L. United States: N. p., 2005. Web. doi:10.1063/1.1923642.
Nomura, K., Iio, S., Ujihira, Y., & Terai, T.. DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L. United States. doi:10.1063/1.1923642.
Nomura, K., Iio, S., Ujihira, Y., and Terai, T.. 2005. "DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L". United States. doi:10.1063/1.1923642.
@article{osti_20722124,
title = {DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L},
author = {Nomura, K. and Iio, S. and Ujihira, Y. and Terai, T.},
abstractNote = {Thin stainless steel films were prepared on SiO2/Si plate heated at 100 deg. C and 400 deg. C using AISI316L as target, by a RF magnetron Ar sputtering method. RF sputtered-deposited films and the oxidized surface layers by post heating were characterized by depth selective conversion electron Moessbauer spectroscopy (DCEMS) using a He+5%CH4 gas proportional counter. The as-deposited films consisted of magnetic phases, the magnetic orientation of which had a tendency to be perpendicular to the surface of the film. In the case of the deposited films at substrate temperature of 100 deg. C, a small amount of Fe2O3 and ferritic stainless steel formed by post-heating in air. A magnetic subcomponent and a austenite phase were formed in the films deposited at substrate temperature of 400 deg. C. {alpha}-Fe2O3 and magnetite formed easily on the top and middle layers of the films by post-heating in air. The oxide states of the films deposited at different temperatures of substrate were clearly distinguished by post-heating. Thus it was found by DCEMS that the structures of the deposited films were strongly affected by the preparation method and the temperature of the substrate.},
doi = {10.1063/1.1923642},
journal = {AIP Conference Proceedings},
number = 1,
volume = 765,
place = {United States},
year = 2005,
month = 4
}
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