Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge

Journal Article · Sat Oct 15 04:00:00 EDT 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2112172· OSTI ID:20719571

Rousseau, A; Teboul, E; Bechu, S ^[1]

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1. Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Route de Saclay, 91128 Palaiseau Cedex (France)

This paper is devoted to the validation of Langmuir probe technique by microwave autointerferometry in a surface wave discharge at medium pressure (from 0.1 up to 10 Torr). Temperatures of neutrals, obtained from Rayleigh scattering, and electrons, given by double probe measurements, have been used to estimate the mean free path and the sheath length. Hence, the number of collisions in the sheath has been obtained. We have verified that two different phenomena occur in the sheath, while the pressure increases. These phenomena are depicted, in literature, as two different coefficients used to modify the value of the noncollisional current of Laframboise. Coefficients given by various authors have been investigated with accuracy knowing the number of collisions in the sheath. Very good agreements are obtained between Zakrzewski and Kopiczynski theory and autointerferometry measurements which are unaffected by collisional phenomena.

• OSTI ID: 20719571
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 98; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
COLLISIONAL PLASMA
COMPARATIVE EVALUATIONS
ELECTRON TEMPERATURE
HIGH-FREQUENCY DISCHARGES
INTERFEROMETRY
LANGMUIR PROBE
MEAN FREE PATH
MICROWAVE RADIATION
PLASMA PRESSURE
PLASMA SHEATH
PLASMA SURFACE WAVES
RAYLEIGH SCATTERING