Particle-in-cell simulations of planar and cylindrical Langmuir probes: Floating potential and ion saturation current

Journal Article · Sat Jul 15 04:00:00 EDT 2006 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2187991· OSTI ID:20777323

Iza, Felipe; Lee, Jae Koo ^[1]

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1. Pohang University of Science and Technology, San-31, Hyoja, Pohang 790-784 (Korea, Republic of)

Particle-in-cell and hybrid electron-Boltzmann simulations of planar and cylindrical Langmuir probes are compared with various probe theories. Floating potentials for planar and cylindrical probes are calculated and significant deviations from the typical approximation used for argon discharges of {approx}5T{sub e} are shown. The interpretation of simulated ion saturation currents by the orbital motion limited and the Laframboise theories result in an overestimation of the ion density. On the other hand, the cold-ion theory underestimates the ion density. These deviations are related to the overestimation and underestimation, respectively, of the ion orbital motion around cylindrical probes. The best agreement is obtained when the probe theory suggested by Tichy et al. is used. This theory incorporates ion orbital motion as in the Laframboise theory, collisional orbital motion destruction as suggested by Zakrzewski and Kopiczynski, and ion scattering as given by Chouet al.

• OSTI ID: 20777323
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 24; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
APPROXIMATIONS
ARGON
BOLTZMANN EQUATION
CURRENTS
CYLINDRICAL CONFIGURATION
ELECTRIC DISCHARGES
ION DENSITY
IONS
LANGMUIR PROBE
PLASMA
PLASMA DENSITY
PLASMA SIMULATION
POTENTIALS
SATURATION
SCATTERING