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Title: Calcium fluoride on Si(001): Adsorption mechanisms and epitaxial growth modes

Journal Article · · Physical Review. B, Condensed Matter and Materials Physics
;  [1]; ; ;  [2]; ;  [1]; ;  [3]
  1. Dipartimento di Ingegneria dei Materiali e dell'Ambiente, Universita di Modena e Reggio Emilia, Via Vignolese 905, 41100-Modena (Italy)
  2. Ioffe Physical-Technical Institute, RAS, Solid State Optics Department, 26 Polytechnicheskaya str., 194021 St. Petersburg (Russian Federation)
  3. INFM-CNR-TASC Laboratory, s.s. 14, km 163.5 in AREA Science Park, 34012 Basovizza, TS (Italy)

Growth of CaF{sub 2} on Si(001) is studied as a function of the substrate temperature during deposition for coverages from fraction of a monolayer (ML) up to several monolayers. Structural and morphological studies using atomic force microscopy, low-energy electron diffraction, and reflection high-energy electron diffraction are combined with measurements of core-level photoemission and x-ray absorption. Bonding between CaF{sub 2} molecules and Si(001) substrates is followed by monitoring core-level shifts and x-ray absorption line shape. It is found that a dissociative reaction occurs at high deposition temperatures ({approx}750 deg. C), giving rise to a 1-ML-thick uniform wetting layer, which is bonded with the substrate through Ca atoms. This wetting layer changes the surface periodicity from double domain 2x1+1x2 to single domain 3x1. Three-dimensional CaF{sub 2} elongated islands develop on top of the wetting layer, with their (110) planes parallel to the Si surface plane. At temperatures below 600 deg. C no dissociative reaction takes place for CaF{sub 2}; nanodimensional islands develop in the form of rectangular-based huts. The crystallographic orientation of these islands is parallel to that of the Si(001) substrate. The data are compared to results obtained on CaF{sub 2} deposited on Si(111)

OSTI ID:
20719172
Journal Information:
Physical Review. B, Condensed Matter and Materials Physics, Vol. 72, Issue 4; Other Information: DOI: 10.1103/PhysRevB.72.045448; (c) 2005 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1098-0121
Country of Publication:
United States
Language:
English

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