Size distribution of sputtered particles from Au nanoislands due to MeV self-ion bombardment

Journal Article · Thu Sep 15 00:00:00 EDT 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2058187· OSTI ID:20714112

Satpati, B; Ghatak, J; Satyam, P V; Dev, B N ^[1]

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1. Institute of Physics, Sachivalaya Marg, Bhubaneswar-751005 (India)

Nanoisland gold films, deposited by vacuum evaporation of gold onto Si(100) substrates, were irradiated with 1.5 MeV Au{sup 2+} ions up to a fluence of 5x10{sup 14} ions cm{sup -2} and at incidence angles up to 60 deg. with respect to the surface normal. The sputtered particles were collected on carbon-coated grids (catcher grid) during ion irradiation and were analyzed with transmission electron microscopy and Rutherford backscattering spectrometry. The average sputtered particle size and the areal coverage are determined from transmission electron microscopy measurements, whereas the amount of gold on the substrate is found by Rutherford backscattering spectrometry. The size distributions of larger particles (number of atoms/particle, n{>=}1000) show an inverse power law with an exponent of {approx}-1 in broad agreement with a molecular-dynamics simulation of ion impact on cluster targets.

• OSTI ID: 20714112
• Journal Information: Journal of Applied Physics, Vol. 98, Issue 6; Other Information: DOI: 10.1063/1.2058187; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
GOLD
GOLD IONS
INCIDENCE ANGLE
ION BEAMS
MAGNETIC ISLANDS
MEV RANGE 01-10
MOLECULAR DYNAMICS METHOD
NANOSTRUCTURES
PARTICLE SIZE
PARTICLES
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SIMULATION
SPUTTERING
SUBSTRATES
SURFACES
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
VACUUM COATING
VACUUM EVAPORATION