Ion-beam-induced embedded nanostructures and nanoscale mixing
- Institute of Physics, Sachivalaya Marg, Bhubaneswar 751 005 (India)
Megaelectron volts ion-induced effects for discontinuous gold nanoislands and for continuous gold films on silicon substrate have been studied. Irradiation was carried out with 1.5 MeV Au{sup 2+} ions at room temperature to various fluences. Cross-sectional transmission electron microscopy and Rutherford backscattering spectrometry are used to study the ion-beam mixing in Au/Si systems. At a fluence of 1x10{sup 14} ions cm{sup -2}, a material push-in effect and a metastable Au-Si phase formation have been observed for Au nanoislands, while no push in or mixing has been observed for the case of continuous films. The mixed phase of Au-Si system is found to be crystalline in nature. The material push- in and ion-beam mixing effects that are observed in case of nanoislands appear to be due to combined effect of capillary driving force, ion-induced viscous flow, and ion-induced energy spike effects.
- OSTI ID:
- 20662153
- Journal Information:
- Journal of Applied Physics, Vol. 96, Issue 9; Other Information: DOI: 10.1063/1.1794899; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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