Unexpectedly high sputtering yield of carbon at grazing angle of incidence ion bombardment
- Research Institute for Technical Physics and Materials Science, Budapest H-1525 P.O. Box 49 (Hungary)
The relative sputtering yield of amorphous carbon with respect to polycrystalline nickel at Ar-ion bombardment was determined by means of Auger electron spectroscopy depth profiling as a function of the angle of incidence and projectile energy in the ranges of 49 deg. -88 deg. and 0.3-1 keV, respectively. It was found that the relative sputtering yield Y{sub C}/Y{sub Ni} strongly increases with angle of incidence from 49 deg. to 82 deg. . At around 80 deg. the sputtering yield of C is higher than that of Ni. Above 82 deg. no dependence on the angle of incidence was found. The relative sputtering yield weakly depends on the energy of the projectile. The experimental results will be explained by the help of transport of ion in solid (TRIM) simulations.
- OSTI ID:
- 20714001
- Journal Information:
- Journal of Applied Physics, Vol. 98, Issue 2; Other Information: DOI: 10.1063/1.1968444; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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