C-axis oriented L1{sub 0} phase FePt thin films by plasma-assisted diffusion

Journal Article · Sun May 15 04:00:00 EDT 2005 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1850382· OSTI ID:20711634

Katayama, Nobuhiro; Maekawa, Tomoaki; Xiaoxi, Liu; Morisako, Akimitsu; Matsumoto, Mitsunori ^[1]

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1. Department of Information Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553 (Japan)

L1{sub 0} phase FePt thin films with different crystal orientation have been prepared by deposition of Fe and Pt separately from the corresponding targets using dc magnetron sputtering and in situ substrate heating. The codiffusion of the Fe and Pt atoms are attributed by the surface bombardment from high energy ions in plasma. The transformation temperature for L1{sub 0} phase FePt is as low as 250 deg. C by this technique. The crystal orientation of the obtained FePt films with L1{sub 0} structure is determined by the orientation of the initial Fe layer.

• OSTI ID: 20711634
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 97; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANISOTROPY
BINARY ALLOY SYSTEMS
CRYSTALS
DEPOSITION
DIFFUSION
FERROMAGNETIC MATERIALS
HYSTERESIS
IRON
IRON ALLOYS
ORIENTATION
PHASE TRANSFORMATIONS
PLASMA
PLATINUM
PLATINUM ALLOYS
SPUTTERING
SUBSTRATES
TEMPERATURE RANGE 0400-1000 K
TEXTURE
THIN FILMS
TRANSITION TEMPERATURE