Discrete focusing effect of positive ions by a plasma-sheath lens

Journal Article · Thu Sep 01 04:00:00 EDT 2005 · Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

DOI:https://doi.org/10.1103/PhysRevE.72.036407· OSTI ID:20706359

Stamate, E; Sugai, H ^[1]

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1. Nagoya University, Department of Electrical Engineering and Computer Science, Furo-cho, Chikusa-ku, Nagoya 464-8603 (Japan)

We demonstrate that the sheath created adjacent to the surface of a negatively biased electrode that interfaces an insulator acts as a lens that focuses the positive ions to distinct regions on the surface. Thus, the positive ion flux is discrete, leading to the formation of a passive surface, of no ion impact, near the edge and an active surface at the center. Trajectories of positive ions within the sheath are obtained by solving in three dimensions the Poisson equation for electrodes of different geometry. Simulations are confirmed by developing the ion flux profile on the electrode surface as the sputtering pattern produced by ion impact. Measurements are performed in a dc plasma produced in Ar gas.

• OSTI ID: 20706359
• Journal Information: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics, Journal Name: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics Journal Issue: 3 Vol. 72; ISSN PLEEE8; ISSN 1063-651X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CATIONS
ELECTRODES
FOCUSING
GEOMETRY
LENSES
PLASMA
PLASMA FOCUS
PLASMA SHEATH
PLASMA SIMULATION
POISSON EQUATION
SPUTTERING
SURFACES