The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY

Journal Article · Wed May 12 04:00:00 EDT 2004 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1757928· OSTI ID:20653085

Siewert, Frank; Noll, Tino; Schlegel, Thomas; Zeschke, Thomas; Lammert, Heiner ^[1]

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1. BESSY, Albert-Einstein-Strasse 15, 12489 Berlin (Germany)

The Nanometer Optical Component measuring Machine (NOM) has been developed at BESSY for the purpose of measuring the surface figure of optical components up to 1.2 m in length used at grazing incidence in Synchrotron Radiation beamlines. It is possible to acquire information about slope and height deviations and the radius of curvature of a sample in the form of line-scans and in a three dimensional display format. With the NOM surfaces up to 600 cm2 have been measured with an estimated measuring uncertainty in the range of 0.01 arcsec rms and with a correspondingly high reproducibility. This is a five to tenfold improvement compared to the present state of the art of surface measuring techniques. The engineering conception, the design of the NOM and the first measurements are discussed in detail.

• OSTI ID: 20653085
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 705; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BEAM OPTICS
BESSY STORAGE RING
DESIGN
EQUIPMENT
ERRORS
GRAZING INCIDENCE TOMOGRAPHY
HEIGHT
LENGTH
MEASURING METHODS
NANOSTRUCTURES
SURFACES
SYNCHROTRON RADIATION
THREE-DIMENSIONAL CALCULATIONS
TOPOGRAPHY
X RADIATION