Development and performance of the nanoworkbench: A four tip STM for conductivity measurements down to submicrometer scales
- Department of Chemistry, Surface Science Center, University of Pittsburgh, Pittsburgh, Pennsylvania 15260 (United States)
A multiple-tip ultrahigh vacuum (UHV) scanning tunneling microscope (MTSTM) with a scanning electron microscope (SEM) for imaging and molecular-beam epitaxy growth capabilities has been developed. This instrument (nanoworkbench) is used to perform four-point probe conductivity measurements at {mu}m spatial dimension. The system is composed of four chambers, the multiple-tip STM/SEM chamber, a surface analysis and preparation chamber, a molecular-beam epitaxy chamber, and a load-lock chamber for fast transfer of samples and probes. The four chambers are interconnected by a unique transfer system based on a sample box with integrated heating and temperature-measuring capabilities. We demonstrate the operation and the performance of the nanoworkbench with STM imaging on graphite and with four-point-probe conductivity measurements on a silicon-on-insulator (SOI) crystal. The creation of a local FET, whose dimension and localization are, respectively, determined by the spacing between the probes and their position on the SOI surface, is demonstrated.
- OSTI ID:
- 20646485
- Journal Information:
- Review of Scientific Instruments, Vol. 76, Issue 4; Other Information: DOI: 10.1063/1.1878213; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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