Ion energy uniformity in high-frequency capacitive discharges
- Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, 91128, Palaiseau Cedex (France)
Ion energy distribution functions and ion fluxes in low-pressure, high-frequency (13.56-80 MHz) capacitive discharges were investigated both theoretically and experimentally. In most of the conditions explored, the ion energy distribution function was a single peak centered at the time-averaged plasma potential. Lower energy ions with higher fluxes are obtained as the frequency increases. The uniformity of the ion energy across large-area electrodes (40 cm{sup 2}) was also studied in conditions under which the standing wave effect is important, i.e., conditions such that the rf voltage and the ion flux are strongly nonuniform. Unlike the latter quantities, the ion energy was uniform across the reactor at all frequencies, due to dc current flowing radially in the plasma and in the electrodes.
- OSTI ID:
- 20636925
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 2; Other Information: DOI: 10.1063/1.1848183; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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