Characterization of gas targets for laser produced extreme ultraviolet plasmas with a Hartmann-Shack sensor
- Laser-Laboratorium Goettingen e. V., Hans-Adolf-Krebs-Weg 1, D-37077 Goettingen (Germany)
A table top extreme ultraviolet (EUV)-source was developed at Laser-Laboratorium Goettingen for the characterization of optical components and sensoric devices in the wavelength region from 11 to 13 nm. EUV radiation is generated by focusing the beam of a Q-switched Nd:YAG laser into a pulsed xenon gas jet. Since a directed gas jet with a high number density is needed for an optimal performance of the source, conical nozzles with different cone angles were drilled with an excimer laser to produce a supersonic gas jet. The influence of the nozzle geometry on the gas jet was characterized with a Hartmann-Shack wave front sensor. The deformation of a planar wave front after passing the gas jet was analyzed with this sensor, allowing a reconstruction of the gas density distribution. Thus, the gas jet was optimized resulting in an increase of EUV emission by a factor of two and a decrease of the plasma size at the same time.
- OSTI ID:
- 20636627
- Journal Information:
- Review of Scientific Instruments, Vol. 75, Issue 10; Other Information: DOI: 10.1063/1.1791314; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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