Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source

Journal Article · Tue Mar 20 04:00:00 EDT 2007 · Applied Optics

DOI:https://doi.org/10.1364/AO.46.001411· OSTI ID:20929650

Lee, Jin-Seok; Yang, Ho-Soon; Hahn, Jae-Won

We developed a new, to the best of our knowledge, test method to measure the wavefront error of the high-NA optics that is used to read the information on the high-capacity optical data storage devices. The main components are a pinhole point source and a Shack-Hartmann sensor. A pinhole generates the high-NA reference spherical wave, and a Shack-Hartmann sensor constructs the wavefront error of the target optics. Due to simplicity of the setup, it is easy to use several different wavelengths without significant changes of the optical elements in the test setup. To reduce the systematic errors in the system, a simple calibration method was developed. In this manner, we could measure the wavefront error of the NA 0.9 objective with the repeatability of 0.003{lambda} rms ({lambda}=632.8 nm) and the accuracy of 0.01{lambda} rms.

• OSTI ID: 20929650
• Journal Information: Applied Optics, Journal Name: Applied Optics Journal Issue: 9 Vol. 46; ISSN 0003-6935; ISSN APOPAI
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
APERTURES
CALIBRATION
CAPACITY
ERRORS
MEMORY DEVICES
OPTICS
POINT SOURCES
REMOTE SENSING
TESTING
WAVELENGTHS