Effect of electrochemical polarization on optical properties of sputter-prepared tin nitride in aqueous electrolyte

Journal Article · Sun Dec 31 23:00:00 EST 1995 · Journal of the Electrochemical Society

DOI:https://doi.org/10.1149/1.1836430· OSTI ID:201412

Maruyama, Toshiro; Osaki, Yoshinori ^[1]

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1. Kyoto Univ. (Japan). Dept. of Chemical Engineering

Tin nitride thin films were prepared by radio-frequency (RF) reactive sputtering. The metallic tin target was sputtered by nitrogen gas with RF magnetron sputtering equipment. Transparent polycrystalline SnN{sub x} thin films were obtained at an RF power of 50 W. On application of {minus}3.0 V in a 1.0 M Na{sub 2}SO{sub 4} solution, SnN{sub x} decomposed into Sn through a reaction with a proton. On subsequent application of +3.0 V, Sn dissolved into the aqueous solution, until inactive SnO{sub 2} was formed at the surface of the Sn. These irreversible changes were accompanied by an increase and a decrease in optical absorption.

• Sponsoring Organization: USDOE
• OSTI ID: 201412
• Journal Information: Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 1 Vol. 143; ISSN JESOAN; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DISSOLUTION
LIGHT TRANSMISSION
OPTICAL PROPERTIES
REDUCTION
SPUTTERING
TIN NITRIDES
TIN OXIDES
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION