Effect of Ge on SiC film morphology in SiC/Si films grown by MOCVD
SiC/Si films generally contain stacking faults and amorphous regions near the interface. High quality SiC/Si films are especially difficult to obtain since the temperatures usually required to grow high quality SiC are above the Si melting point. The authors added Ge in the form of GeH{sub 2} to the reactant gases to promote two-dimensional CVD growth of SiC films on (111) Si substrates at 1,000 C. The films grown with no Ge are essentially amorphous with very small crystalline regions, whereas those films grown with GeH{sub 2} flow rates of 10 and 15 sccm are polycrystalline with the 3C structure. Increasing the flow rate to 20 sccm improves the crystallinity and induces growth of 6H SiC over an initial 3C layer. This study presents the first observation of spontaneous polytype transformation in SiC grown on Si by MOCVD.
- Research Organization:
- Univ. of Maryland, College Park, MD (US)
- Sponsoring Organization:
- US Department of the Army
- OSTI ID:
- 20104708
- Country of Publication:
- United States
- Language:
- English
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