On-Wafer Wide-Pore Anodic Aluminum Oxide

Kim, Nam; Casareto, Marco; Mowbray, Miles; Henry, Robert; Hayden, John; Rubloff, Gary; Lee, Sang Bok; Gregorczyk, Keith E.

doi:10.1149/1945-7111/acd87b

On-Wafer Wide-Pore Anodic Aluminum Oxide

Journal Article · Tue Jun 13 00:00:00 EDT 2023 · Journal of the Electrochemical Society

DOI:https://doi.org/10.1149/1945-7111/acd87b· OSTI ID:2006454

Kim, Nam ^[1]; Casareto, Marco ^[2]; Mowbray, Miles ^[2]; Henry, Robert ^[2]; Hayden, John ^[2]; Rubloff, Gary ^[2]; ^[2]; ^[2]

University of Maryland, College Park, MD (United States); University of Maryland
University of Maryland, College Park, MD (United States)

Anodized aluminum oxide (AAO) has been used as nanotemplates for nanomaterials and nanodevice fabrications. Microfabrication techniques are attracting attention for nanodevice synthesis. However, AAO requires a microfabrication-compatible substrate due to its brittleness. While there are studies that already show AAO on compatible substrates, the pore sizes may not be applicable for multicomponent nanodevices. In this study, wide pore AAOs with ohmic bottom contacts are fabricated on 76 mm Si wafers. Sputtering was used to deposit Al along with supporting layers to achieve this goal. A quiescent electropolishing technique was used to smooth the surface of Al. Standard photolithography was used to define the active area on the Al for anodization. Then 195 V two-step anodization was performed to fabricate wide pore AAOs with pore diameters ranging from 130 ± 32 nm to 400 ± 31 nm with interpore distance of 480 ± 47 nm. Furthermore, it also showed that the ordering of the pores depended on the current density over the more conventional anodization time.

View Accepted Manuscript (DOE)

Research Organization:: University of Maryland, College Park, MD (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0021070

OSTI ID:: 2006454

Journal Information:: Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 6 Vol. 170; ISSN 0013-4651

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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