Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Expanding the Energy Range from eV to MeV Enabling Novel Focused Ion Beam Nanofabrication and Modification.

Conference ·
DOI:https://doi.org/10.2172/2006362· OSTI ID:2006362
; ; ; ; ; ; ; ;

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
NA0003525
OSTI ID:
2006362
Report Number(s):
SAND2022-10363C; 712676
Country of Publication:
United States
Language:
English

Similar Records

Expanding the Energy Range from eV to MeV and Fabrication of Sources Enabling Novel Focused Ion Beam Nanofabrication and Modification
Journal Article · Mon Aug 01 00:00:00 EDT 2022 · Microscopy and Microanalysis · OSTI ID:1989161
Focused Ion Beam Implantation from eV to MeV Energies.
Conference · Thu Sep 01 00:00:00 EDT 2022 · OSTI ID:2004768
Ion Beam Implantation for Nanofabrication and Modification.
Conference · Thu Dec 31 23:00:00 EST 2020 · OSTI ID:1854666

Related Subjects