Raman and PEELS studies of magnetron sputtered a-C

Journal Article · Sun Jan 30 04:00:00 EST 2000 · International Journal of Modern Physics B

DOI:https://doi.org/10.1142/S0217979200000261· OSTI ID:20023269

Zhang, S; Jen, T M; Zeng, X; Xie, H; Hing, P

Amorphous carbon coatings (a-C, a-C:H) of less than 100 nm thick were deposited on KBr pellets and silicon wafer substrate via magnetron sputtering of graphic target in argon, argon/hydrogen and argon/nitrogen atmosphere. Parallel electron energy loss spectroscopy (PEELS) analysis was used to quantify the sp{sup 2}/sp{sup 3} bonding in carbon films. Stand-alone films of amorphous carbon were produced by sputtering onto compressed KBr pellets and then floating off in distilled water for PEELS study. Raman spectroscopy was used to measure the peak intensity ratio of D-band to that of the G-band (I{sub d}/I{sub g}). It shows that higher sp{sup 3} fraction often associates with Raman peak ratio I{sub d}/I{sub g}. At the same time, G-band peak position P{sub g} decreases while sp{sup 3} fraction increases.

• Research Organization: Gintic Inst. of Manufacturing Technology (SG)
• OSTI ID: 20023269
• Journal Information: International Journal of Modern Physics B, Journal Name: International Journal of Modern Physics B Journal Issue: 2-3 Vol. 14; ISSN IJPBEV; ISSN 0217-9792
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
CARBON
CRYSTAL STRUCTURE
ENERGY-LOSS SPECTROSCOPY
RAMAN SPECTROSCOPY
SPUTTERING