Highly conductive and optically transparent polycrystalline iridium oxide thin films grown by reactive pulsed laser deposition
Reactive pulsed laser deposition has been used to deposit IrO{sub 2} thin films on both SiO{sub 2} and fused quartz substrates, by ablating a metal iridium target in oxygen atmosphere. At a KrF laser intensity of about 1.7 x 10{sup 9} W/cm{sup 2}, IrO{sub 2} films were deposited at substrate deposition temperatures ranging from room-temperature to 700 C under an optimum oxygen ambient pressure of 200 mTorr. The structure, morphology, electrical resistivity and optical transmission of the deposited films were characterized as a function of their deposition temperature (T{sub d}). High quality IrO{sub 2} films are obtained in the 400--600 C deposition temperature range. They are polycrystalline with preferred orientations, depending on the substrate, and show a dense granular morphology. At a T{sub d} as low as 400 C, highly conductive IrO{sub 2} films with room-temperature resistivities as low as (42 {+-} 6) {micro}{Omega} cm are obtained. Over the 300--600 C T{sub d} range, the IrO{sub 2} films were found to exhibit a maximum optical transmission at 450 C ({approximately}45% at 500 nm for 80 nm-thick films).
- Research Organization:
- INRS, Varennes, Quebec (CA)
- Sponsoring Organization:
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- OSTI ID:
- 20015566
- Resource Relation:
- Conference: Polycrystalline thin films - Structure, Texture, Properties and Applications III, San Francisco, CA (US), 03/31/1997--04/04/1997; Other Information: Single article reprints from this publication are available through University Microfilms Inc., 300 North Zeeb Road, Ann Arbor, MI 48106; PBD: 1997; Related Information: In: Polycrystalline thin films -- Structure, texture, properties and applications III. Materials Research Society symposium proceedings: Volume 472, by Yalisove, S.M.; Adams, B.L.; Im, J.S.; Zhu, Y.; Chen, F.R. [eds.], 489 pages.
- Country of Publication:
- United States
- Language:
- English
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