Deposition and characterization of α-Fe2O3/Pd thin films for neutron reflectometry studies

Wang, Hanyu; Self, Ethan C.; Addamane, Sadhvikas J.; Rouleau, Christopher M.; Wixom, Ryan R.; Browning, Katie L.; Veith, Gabriel M.; Liang, Liyuan; Browning, James F.

doi:10.1116/6.0002717

Deposition and characterization of α-Fe₂O₃/Pd thin films for neutron reflectometry studies

Journal Article · Fri Jul 14 00:00:00 EDT 2023 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/6.0002717· OSTI ID:1991731

^[1]; ^[1]; ^[2]; Rouleau, Christopher M. ^[3]; ^[2]; ^[1]; Veith, Gabriel M. ^[1]; ^[4]; ^[1]

Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies (CINT)
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Univ. of Tennessee, Knoxville, TN (United States)

Here, we report deposition of hematite/Pd thin films on silicon wafers via radio frequency (RF) magnetron sputtering and subsequent characterization for future in situ neutron reflectometry studies. Following deposition, the hematite/Pd thin films were characterized as prepared and after annealing in air for 2h at 400, 500, and 600 °C, respectively. Raman spectroscopy, grazing incidence x-ray diffraction, and neutron reflectometry (NR) were used to characterize the structure and chemical compositions of the thin films. The results indicate that pure α-Fe₂O₃ (hematite) films were produced, free from other iron oxide phases and impurities. NR data reveal that one intermediate layer between the Pd layer and the hematite layer was formed during sputtering deposition processes. The fitted scattering length density (SLD) of the as-deposited hematite layer is 70% of the theoretical SLD value, indicating that the grains are loosely packed in the RF-deposited hematite films. After annealing at elevated temperatures, the hematite films show increased SLD values but remain comparable to that of preannealed.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS); Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC05-00OR22725; NA0003525

OSTI ID:: 1991731

Alternate ID(s):: OSTI ID: 2311362

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 5 Vol. 41; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
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