Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

Kuruma, Kazuhiro; Piracha, Afaq Habib; Renaud, Dylan; Chia, Cleaven; Sinclair, Neil; Nadarajah, Athavan; Stacey, Alastair; Prawer, Steven; Lončar, Marko

doi:10.1063/5.0061778

Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

Journal Article · Tue Oct 26 00:00:00 EDT 2021 · Applied Physics Letters

DOI:https://doi.org/10.1063/5.0061778· OSTI ID:1978948

^[1]; Piracha, Afaq Habib ^[2]; Renaud, Dylan ^[2]; Chia, Cleaven ^[2]; Sinclair, Neil ^[3]; Nadarajah, Athavan ^[4]; ^[5]; Prawer, Steven ^[4]; ^[2]

Harvard University, Cambridge, MA (United States); Harvard Univ., Cambridge, MA (United States)
Harvard University, Cambridge, MA (United States)
Harvard University, Cambridge, MA (United States); California Institute of Technology (CalTech), Pasadena, CA (United States)
University of Melbourne, VIC (Australia)
University of Melbourne, VIC (Australia); RMIT University, Melbourne, VIC (Australia)

We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (~300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ~8 × 10⁶ and a relatively small mode volume of ~2(λ/n)³. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360–1470 nm) with Q factors of up to ~1800. Our method paves the way for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.

View Accepted Manuscript (DOE)

Research Organization:: California Institute of Technology (CalTech), Pasadena, CA (United States); Harvard University, Cambridge, MA (United States)

Sponsoring Organization:: Air Force; Air Force Office of Scientific Research (AFOSR); Army Research Office (ARO); Australian Research Council; Japan Society for the Promotion of Science (JSPS); National Science Foundation (NSF); Natural Sciences and Engineering Research Council of Canada (NSERC); Office of Naval Research (ONR); USDOE Office of Science (SC)

Grant/Contract Number:: SC0020376

OSTI ID:: 1978948

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 17 Vol. 119; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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