Defect structures as a function of ion irradiation and annealing in LiNbO3

Lang, Eric; Beechem, Thomas; McDonald, Anthony; Friedmann, Tom; Olsson, III, Roy H.; Stevens, Jeffrey O.; Clark, Blythe G.; Hattar, Khalid

doi:10.1016/j.tsf.2023.139719

Defect structures as a function of ion irradiation and annealing in LiNbO3

Journal Article · Wed Mar 01 00:00:00 EST 2023 · Thin Solid Films

DOI:https://doi.org/10.1016/j.tsf.2023.139719· OSTI ID:1960904

; ; McDonald, Anthony; Friedmann, Tom; ; Stevens, Jeffrey O.; Clark, Blythe G.; Hattar, Khalid

Not Available

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0003525

OSTI ID:: 1960904

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: C Vol. 768; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (35)

Photonic applications of lithium niobate crystals Arizmendi, L. physica status solidi (a), Vol. 201, Issue 2 https://doi.org/10.1002/pssa.200303911	journal	January 2004
Lithium niobate: Summary of physical properties and crystal structure Weis, R. S.; Gaylord, T. K. Applied Physics A Solids and Surfaces, Vol. 37, Issue 4 https://doi.org/10.1007/BF00614817	journal	August 1985
Helium-assisted cavity formation in ion-irradiated ceramics Zinkle, S. J.; Kojima, S. Journal of Nuclear Materials, Vol. 179-181 https://doi.org/10.1016/0022-3115(91)90108-J	journal	March 1991
Amorphization and recrystallization of the ABO3 oxides Meldrum, A.; Boatner, L. A.; Weber, W. J. Journal of Nuclear Materials, Vol. 300, Issue 2-3 https://doi.org/10.1016/S0022-3115(01)00733-4	journal	February 2002
Optical waveguide formation by MeV H+ implanted into LiNbO3 crystal Hu, Hui; Lu, Fei; Chen, Feng Optics Communications, Vol. 177, Issue 1-6 https://doi.org/10.1016/S0030-4018(00)00526-5	journal	April 2000
Extraordinary refractive-index increase in MeV B3+ ion-implanted LiNbO3 waveguide Fu, Gang; Wang, Ke-Ming; Chen, Feng Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 211, Issue 3 https://doi.org/10.1016/S0168-583X(03)01368-5	journal	November 2003
Electro-optic coefficients in H+-ion implanted LiNbO3 planar waveguide Boudrioua, A.; Ould Salem, S.; Moretti, P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 147, Issue 1-4 https://doi.org/10.1016/S0168-583X(98)00602-8	journal	January 1999
Refractive index profiles in LiNbO3 waveguide formed by 3.2 MeV He ions Wang, Ke-Ming; Lu, Fei; Hu, Hui Surface and Coatings Technology, Vol. 128-129 https://doi.org/10.1016/S0257-8972(00)00618-6	journal	June 2000
Bubble formation and lattice parameter changes resulting from He irradiation of defect-fluorite Gd2Zr2O7 Taylor, Caitlin A.; Patel, Maulik K.; Aguiar, Jeffery A. Acta Materialia, Vol. 115 https://doi.org/10.1016/j.actamat.2016.05.045	journal	August 2016
Krypton and helium irradiation damage in neodymium–zirconolite Gilbert, M.; Davoisne, C.; Stennett, M. Journal of Nuclear Materials, Vol. 416, Issue 1-2 https://doi.org/10.1016/j.jnucmat.2010.11.089	journal	September 2011
Patterning of LiNbO3 by means of ion irradiation using the electronic energy deposition and wet etching Gischkat, Th.; Hartung, H.; Schrempel, F. Microelectronic Engineering, Vol. 86, Issue 4-6 https://doi.org/10.1016/j.mee.2008.11.031	journal	April 2009
Srim-2003 Ziegler, James F. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 219-220 https://doi.org/10.1016/j.nimb.2004.01.208	journal	June 2004
Crystal–ion-slicing lithium niobate film performed by 250keV 4He ion implantation Yu, Y.C.; Chen, C.H.; Niu, H. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 256, Issue 1, p. 558-560 https://doi.org/10.1016/j.nimb.2006.12.058	journal	March 2007
Development of ion-implanted optical waveguides in optical materials: A review Chen, Feng; Wang, Xue-Lin; Wang, Ke-Ming Optical Materials, Vol. 29, Issue 11 https://doi.org/10.1016/j.optmat.2006.08.001	journal	July 2007
A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication Olsson, Roy H.; Hattar, Khalid; Homeijer, Sara J. Sensors and Actuators A: Physical, Vol. 209, p. 183-190 https://doi.org/10.1016/j.sna.2014.01.033	journal	March 2014
Light emission during negative heavy ion implantation into lithium niobate and sapphire Plaksin, O. A.; Takeda, Y.; Amekura, H. Vacuum, Vol. 74, Issue 3-4 https://doi.org/10.1016/j.vacuum.2004.01.012	journal	June 2004
Fabrication of single-crystal lithium niobate films by crystal ion slicing Levy, M.; Osgood, R. M.; Liu, R. Applied Physics Letters, Vol. 73, Issue 16 https://doi.org/10.1063/1.121801	journal	October 1998
Damage effects produced in the near-surface region of x-cut LiNbO3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions Bentini, G. G.; Bianconi, M.; Correra, L. Journal of Applied Physics, Vol. 96, Issue 1 https://doi.org/10.1063/1.1756219	journal	July 2004
Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding Rabiei, Payam; Gunter, Peter Applied Physics Letters, Vol. 85, Issue 20 https://doi.org/10.1063/1.1819527	journal	November 2004
Optical properties of stoichiometric LiNbO3 waveguides formed by low-dose oxygen ion implantation Wang, Xue-Lin; Wang, Ke-Ming; Chen, Feng Applied Physics Letters, Vol. 86, Issue 4 https://doi.org/10.1063/1.1854202	journal	January 2005
Compositional and structural changes in LiNbO3 following deep He+ ion implantation for film exfoliation Roth, Ryan M.; Djukic, Djordje; Lee, Yoo Seung Applied Physics Letters, Vol. 89, Issue 11 https://doi.org/10.1063/1.2352798	journal	September 2006
Reduction in thermal boundary conductance due to proton implantation in silicon and sapphire Hopkins, Patrick E.; Hattar, Khalid; Beechem, Thomas Applied Physics Letters, Vol. 98, Issue 23 https://doi.org/10.1063/1.3592822	journal	June 2011
Optical waveguides in lithium niobate: Recent developments and applications Bazzan, Marco; Sada, Cinzia Applied Physics Reviews, Vol. 2, Issue 4 https://doi.org/10.1063/1.4931601	journal	December 2015
Ion-cut lithium niobate on insulator technology: Recent advances and perspectives Jia, Yuechen; Wang, Lei; Chen, Feng Applied Physics Reviews, Vol. 8, Issue 1 https://doi.org/10.1063/5.0037771	journal	March 2021
Irradiation-induced amorphization: Effects of temperature, ion mass, cascade size, and dose rate Wang, S. X.; Wang, L. M.; Ewing, R. C. Physical Review B, Vol. 63, Issue 2 https://doi.org/10.1103/PhysRevB.63.024105	journal	December 2000
Twinning and dislocation pileups in heavily implanted LiNbO 3 Ofan, Avishai; Gaathon, Ophir; Zhang, Lihua Physical Review B, Vol. 83, Issue 6 https://doi.org/10.1103/PhysRevB.83.064104	journal	February 2011
Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces Gorham, Caroline S.; Hattar, Khalid; Cheaito, Ramez Physical Review B, Vol. 90, Issue 2 https://doi.org/10.1103/PhysRevB.90.024301	journal	July 2014
A review of lithium niobate modulators for fiber-optic communications systems Wooten, E. L.; Kissa, K. M.; Yi-Yan, A. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 6, Issue 1 https://doi.org/10.1109/2944.826874	journal	January 2000
Application of Transmission Electron Microscopy to Radiation Damage in Ceramics Hobbs, L. W. Journal of the American Ceramic Society, Vol. 62, Issue 5-6 https://doi.org/10.1111/j.1151-2916.1979.tb09480.x	journal	May 1979
Ion Implantation of Optical Materials Buchal, C.; Withrow, S. P.; White, C. W. Annual Review of Materials Science, Vol. 24, Issue 1 https://doi.org/10.1146/annurev.ms.24.080194.001013	journal	August 1994
Extraordinary refractive-index increase in lithium niobate caused by low-dose ion implantation Hu, Hui; Lu, Fei; Chen, Feng Applied Optics, Vol. 40, Issue 22 https://doi.org/10.1364/AO.40.003759	journal	August 2001
Integrated photonics on thin-film lithium niobate Zhu, Di; Shao, Linbo; Yu, Mengjie Advances in Optics and Photonics, Vol. 13, Issue 2 https://doi.org/10.1364/AOP.411024	journal	January 2021
Micro-Raman spectroscopic visualization of lattice vibrations and strain in He^+- implanted single-crystal LiNbO_3 Huang, Hsu-Cheng; Dadap, Jerry I.; Herman, Irving P. Optical Materials Express, Vol. 4, Issue 2 https://doi.org/10.1364/OME.4.000338	journal	January 2014
Mechanical properties of ion-implanted amorphous silicon Follstaedt, D. M.; Knapp, J. A.; Myers, S. M. Journal of Materials Research, Vol. 19, Issue 1 https://doi.org/10.1557/jmr.2004.19.1.338	journal	January 2004
TEM study of alpha-damaged plutonium and americium dioxides Wiss, Thierry; Dieste-Blanco, Oliver; Tacu, Anca Journal of Materials Research, Vol. 30, Issue 9 https://doi.org/10.1557/jmr.2015.37	journal	March 2015

Similar Records

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

Journal Article · Fri Jul 31 20:00:00 EDT 2015 · Optical Materials · OSTI ID:1250232

Defect structures as a function of ion irradiation and annealing in LiNbO3

Citation Formats

References (35)

Similar Records

Related Subjects