Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

Huang, Hsu-Cheng; Malladi, Girish; Zhang, Lihua; Dadap, Jerry I.; Kisslinger, Kim; Bakhru, Hassaram; Osgood, Jr., Richard M.

doi:10.1016/j.optmat.2015.03.019

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

Journal Article · Sat Aug 01 00:00:00 EDT 2015 · Optical Materials

DOI:https://doi.org/10.1016/j.optmat.2015.03.019· OSTI ID:1250232

; Malladi, Girish; Zhang, Lihua; Dadap, Jerry I.; Kisslinger, Kim; Bakhru, Hassaram; Osgood, Jr., Richard M.

Not Available

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-98CH10886

OSTI ID:: 1250232

Journal Information:: Optical Materials, Journal Name: Optical Materials Journal Issue: C Vol. 46; ISSN 0925-3467

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (16)

Patterning of LiNbO3 by means of ion irradiation using the electronic energy deposition and wet etching Gischkat, Th.; Hartung, H.; Schrempel, F. Microelectronic Engineering, Vol. 86, Issue 4-6 https://doi.org/10.1016/j.mee.2008.11.031	journal	April 2009
Ion beam enhanced etching of LiNbO3 Schrempel, F.; Gischkat, Th.; Hartung, H. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 250, Issue 1-2 https://doi.org/10.1016/j.nimb.2006.04.101	journal	September 2006
Heavy ion beam micromachining on LiNbO3 Nesprías, F.; Venturino, M.; Debray, M. E. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 267, Issue 1 https://doi.org/10.1016/j.nimb.2008.10.083	journal	January 2009
Fabrication of single-crystal lithium niobate films by crystal ion slicing Levy, M.; Osgood, R. M.; Liu, R. Applied Physics Letters, Vol. 73, Issue 16 https://doi.org/10.1063/1.121801	journal	October 1998
X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNbO3 Djukic, Djordje; Roth, Ryan M.; Osgood, R. M. Applied Physics Letters, Vol. 91, Issue 11 https://doi.org/10.1063/1.2776859	journal	September 2007
Origin of highly spatially selective etching in deeply implanted complex oxides Ofan, Avishai; Gaathon, Ophir; Vanamurthy, Lakshmanan Applied Physics Letters, Vol. 93, Issue 18 https://doi.org/10.1063/1.3013821	journal	November 2008
Light propagation in a free-standing lithium niobate photonic crystal waveguide Geiss, R.; Diziain, S.; Iliew, R. Applied Physics Letters, Vol. 97, Issue 13 https://doi.org/10.1063/1.3496040	journal	September 2010
Spherical solid He nanometer bubbles in an anisotropic complex oxide Ofan, Avishai; Zhang, Lihua; Gaathon, Ophir Physical Review B, Vol. 82, Issue 10 https://doi.org/10.1103/PhysRevB.82.104113	journal	September 2010
Twinning and dislocation pileups in heavily implanted LiNbO 3 Ofan, Avishai; Gaathon, Ophir; Zhang, Lihua Physical Review B, Vol. 83, Issue 6 https://doi.org/10.1103/PhysRevB.83.064104	journal	February 2011
Ridged LiNbO$_3$Modulators Fabricated by a Novel Oxygen-Ion Implant/Wet-Etch Technique Gill, D. M.; Jacobson, D.; White, C. A. Journal of Lightwave Technology, Vol. 22, Issue 3 https://doi.org/10.1109/JLT.2004.825764	journal	March 2004
Silicon photonics for next generation system integration platform Arakawa, Yasuhiko; Nakamura, Takahiro; Urino, Yutaka IEEE Communications Magazine, Vol. 51, Issue 3 https://doi.org/10.1109/MCOM.2013.6476868	journal	March 2013
Etching of Ion Irradiated LiNbO[sub 3] in Aqueous Hydrofluoric Solutions Reinisch, Jakob; Schrempel, Frank; Gischkat, Thomas Journal of The Electrochemical Society, Vol. 155, Issue 4 https://doi.org/10.1149/1.2840567	journal	January 2008
Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching Hartung, Holger; Kley, Ernst-Berhard; Tünnermann, Andreas Optics Letters, Vol. 33, Issue 20 https://doi.org/10.1364/OL.33.002320	journal	October 2008
Radiation damage by light- and heavy-ion bombardment of single-crystal LiNbO_3 Huang, Hsu-Cheng; Zhang, Lihua; Malladi, Girish Optical Materials Express, Vol. 5, Issue 5 https://doi.org/10.1364/OME.5.001071	journal	January 2015
Low-voltage planar-waveguide electrooptic prism scanner in Crystal-Ion-Sliced thin-film LiNbO3 Djukic, Djordje; Roth, Ryan; Yardley, James T. Optics Express, Vol. 12, Issue 25 https://doi.org/10.1364/OPEX.12.006159	journal	January 2004
Integrated Optical Devices in Lithium Niobate Sohler, Wolfgang; Hu, Hui; Ricken, Raimund Optics and Photonics News, Vol. 19, Issue 1 https://doi.org/10.1364/OPN.19.1.000024	journal	January 2008

Similar Records

Defect structures as a function of ion irradiation and annealing in LiNbO3

Journal Article · Tue Feb 28 19:00:00 EST 2023 · Thin Solid Films · OSTI ID:1960904

Sequential decay of light fragments in heavy ion reactions

Journal Article · Mon Jun 11 00:00:00 EDT 1973 · Phys. Lett., B, v. 44B, no. 6, pp. 487-490 · OSTI ID:4464232

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

Citation Formats

References (16)

Similar Records

Related Subjects