Thermochromism of metal-doped VO{sub 2} films deposited by dual-target sputtering
- National Industrial Research Inst., Nagoya (Japan)
There are several kinds of chromogenic materials such as photochromic material, electrochromic material and thermochromic material, of which the thermochromic one is known for its optical properties (transmittance and reflectance) being able to change reversibly upon temperature. Among the chromogenic materials feasible to smart window coatings, thermochromic (TC) one has recently received increasing attention, since a window with TC coating enables automatic control of the energy throughputs of the solar radiation as well as the environmental radiation in response to the ambient temperature. Here, thermochromic VO{sub 2} films were prepared by reactive magnetron sputtering under various conditions of substrate temperature, total sputter pressure and oxygen flow ratio and characterized by XRD, RBS, AFM and spectrophotometry. Films with VO{sub 2} single phase were formed from a fairly low substrate temperature of 300 C by precisely controlling the oxygen flow ratio. The use of vanadium nucleated substrates significantly improved the crystallinity of VO{sub 2}. Tungsten doped V{sub 1{minus}x}W{sub x}O{sub 2} films with x = 0--0.26 were formed by dual-target sputtering and the thermochromism of films was evaluated. The tungsten doping linearly decreased {tau}{sub c} by 24 C/at.%W with a reduction in the hysteresis loop width.
- OSTI ID:
- 194841
- Report Number(s):
- CONF-9404167--; ISBN 0-8194-1564-2
- Country of Publication:
- United States
- Language:
- English
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