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Growth of high quality c-SiGe p-n double layers for high-efficiency solar cells

Conference ·
OSTI ID:191005
; ; ;  [1]; ; ;  [2]
  1. Max-Planck-Inst. fuer Festkoerperforschung, Stuttgart (Germany)
  2. Univ. Erlangen-Nuernberg, Erlangen (Germany). Inst. fuer Werkstoffwissenschaften 7
The authors have grown Silicon-Germanium alloys and p-n junctions of high crystal quality on Si substrates by LPE from Bi, Ga, and in solutions at temperatures between 300 and 920 C. The layer thicknesses ranged from 1 nm to 100 {micro}m. Doping levels from 1 {times} 10{sup 16} to 4 {times} 10{sup 19} cm{sup {minus}3} were obtainable by using Ga and As as dopants. The carrier mobility values reached 50% of the upper theoretical limit. Average dislocation densities were below 5 {times} 10{sup 8} cm{sup {minus}2}, even for Ge on Si. Growth rates above 60nm/sec were for example achieved on 4 inch substrates. Layers grown from In solution gave the best data for photovoltaic applications.
OSTI ID:
191005
Report Number(s):
CONF-941203--; ISBN 0-7803-1459-X
Country of Publication:
United States
Language:
English