Digital and Gradient Refractive Index Planar Optics by Nanoimprinting Mesoporous Silicon

Hardison, Anna L.; Talukdar, Tahmid H.; Kravchenko, Ivan I.; Ryckman, Judson D.

doi:10.1002/adom.202201597

Title: Digital and Gradient Refractive Index Planar Optics by Nanoimprinting Mesoporous Silicon

Journal Article · Thu Nov 10 00:00:00 EST 2022 · Advanced Optical Materials

DOI:https://doi.org/10.1002/adom.202201597· OSTI ID:1906602

Hardison, Anna L. ^[1]; Talukdar, Tahmid H. ^[1];

^[2];

^[1]

Clemson University, SC (United States)
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

We report the realization of digital and gradient index flat-optics and planar waveguides using the ‘nanoimprinting refractive index’ (NIRI) technique applied to mesoporous silicon. This technique combines the distinct optical and mechanical metamaterial qualities of mesoporous silicon, including its widely tunable effective refractive index and ability to undergo plastic deformation with a near zero Poisson ratio. Nanoimprinting with premastered and reusable stamps containing analog or digital features enables the continuous or discontinuous patterning of refractive index with high contrast Δn ≥ 0.8 and subwavelength resolution. Using NIRI we experimentally demonstrate a wavefront shaping flat microlens array operating in the visible (405–635 nm) and mesoporous silicon and silica waveguides operating near 1310 nm. This study demonstrates the viability of patterning arbitrary refractive index distributions, n(x,y), on the surface of a chip while circumventing the challenges and limitations of top-down lithographic techniques – thus opening a low-cost and scalable approach for the realization of advanced planar optical technologies.

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Research Organization:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

Grant/Contract Number:: AC05-00OR22725; 1825787; 2047015

OSTI ID:: 1906602

Journal Information:: Advanced Optical Materials, Vol. 10, Issue 24; ISSN 2195-1071

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

References (41)

Advances in exploiting the degrees of freedom in nanostructured metasurface design: from 1 to 3 to more Li, Zile; Yu, Shaohua; Zheng, Guoxing Nanophotonics, Vol. 9, Issue 12 https://doi.org/10.1515/nanoph-2020-0127	journal	April 2020
All-dielectric metamaterials Jahani, Saman; Jacob, Zubin Nature Nanotechnology, Vol. 11, Issue 1 https://doi.org/10.1038/nnano.2015.304	journal	January 2016
Metamaterial-inspired silicon nanophotonics Staude, Isabelle; Schilling, Jörg Nature Photonics, Vol. 11, Issue 5 https://doi.org/10.1038/nphoton.2017.39	journal	April 2017
Subwavelength integrated photonics Cheben, Pavel; Halir, Robert; Schmid, Jens H. Nature, Vol. 560, Issue 7720 https://doi.org/10.1038/s41586-018-0421-7	journal	August 2018
Roughness Suppression in Electrochemical Nanoimprinting of Si for Applications in Silicon Photonics Sharstniou, Aliaksandr; Niauzorau, Stanislau; Hardison, Anna L. Advanced Materials, Vol. 34, Issue 43 https://doi.org/10.1002/adma.202206608	journal	September 2022
Fiber-to-chip coupler designed using an optical transformation Markov, Petr; Valentine, Jason G.; Weiss, Sharon M. Optics Express, Vol. 20, Issue 13 https://doi.org/10.1364/OE.20.014705	journal	June 2012
An optical cloak made of dielectrics Valentine, Jason; Li, Jensen; Zentgraf, Thomas Nature Materials, Vol. 8, Issue 7, p. 568-571 https://doi.org/10.1038/nmat2461	journal	April 2009
Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff Lalanne, Philippe; Astilean, Simion; Chavel, Pierre Journal of the Optical Society of America A, Vol. 16, Issue 5, p. 1143-1156 https://doi.org/10.1364/JOSAA.16.001143	journal	January 1999
A High Aspect Ratio Inverse-Designed Holey Metalens Lim, Soon Wei Daniel; Meretska, Maryna L.; Capasso, Federico Nano Letters, Vol. 21, Issue 20 https://doi.org/10.1021/acs.nanolett.1c02612	journal	October 2021
All-dielectric subwavelength metasurface focusing lens West, Paul R.; Stewart, James L.; Kildishev, Alexander V. Optics Express, Vol. 22, Issue 21 https://doi.org/10.1364/OE.22.026212	journal	January 2014
Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays Arbabi, Amir; Horie, Yu; Ball, Alexander J. Nature Communications, Vol. 6, Article No. 7069 https://doi.org/10.1038/ncomms8069	journal	May 2015
Enhanced Sensitivity of Subwavelength Multibox Waveguide Microring Resonator Label-Free Biosensors Luan, Enxiao; Yun, Han; Laplatine, Loic IEEE Journal of Selected Topics in Quantum Electronics, Vol. 25, Issue 3 https://doi.org/10.1109/JSTQE.2018.2821842	journal	May 2019
Integrated photonic guided metalens based on a pseudo-graded index distribution Hassan, Karim; Dallery, Jacques-Alexandre; Brianceau, Pierre Scientific Reports, Vol. 10, Issue 1 https://doi.org/10.1038/s41598-020-58029-z	journal	January 2020
IR GRIN lenses prepared by ionic exchange in chalcohalide glasses Fourmentin, Claire; Zhang, Xiang-Hua; Lavanant, Enora Scientific Reports, Vol. 11, Issue 1 https://doi.org/10.1038/s41598-021-90626-4	journal	May 2021
Integrated Photonics on Glass: A Review of the Ion-Exchange Technology Achievements Broquin, Jean-Emmanuel; Honkanen, Seppo Applied Sciences, Vol. 11, Issue 10 https://doi.org/10.3390/app11104472	journal	May 2021
High-efficiency Bragg gratings in photothermorefractive glass Efimov, Oleg M.; Glebov, Leonid B.; Glebova, Larissa N. Applied Optics, Vol. 38, Issue 4 https://doi.org/10.1364/AO.38.000619	journal	January 1999
Planar refractive index patterning through microcontact photo-thermal annealing of a printable organic/inorganic hybrid material Bachevillier, Stefan; Yuan, Hua-Kang; Tetzner, Kornelius Materials Horizons, Vol. 9, Issue 1 https://doi.org/10.1039/D1MH01366A	journal	January 2022
Direct Electrospray Printing of Gradient Refractive Index Chalcogenide Glass Films Novak, Spencer; Lin, Pao Tai; Li, Cheng ACS Applied Materials & Interfaces, Vol. 9, Issue 32 https://doi.org/10.1021/acsami.7b06140	journal	August 2017
Single-step manufacturing of hierarchical dielectric metalens in the visible Yoon, Gwanho; Kim, Kwan; Huh, Daihong Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-16136-5	journal	May 2020
Development of tuned refractive-index nanocomposites to fabricate nanoimprinted optical devices Hemmati, Hafez; Magnusson, Robert Optical Materials Express, Vol. 8, Issue 1 https://doi.org/10.1364/OME.8.000175	journal	January 2018
Evidence of spatially selective refractive index modification in 15GeSe_2-45As_2Se_3-40PbSe glass ceramic through correlation of structure and optical property measurements for GRIN applications Sisken, Laura; Smith, Charmayne; Buff, Andrew Optical Materials Express, Vol. 7, Issue 9 https://doi.org/10.1364/OME.7.003077	journal	August 2017
Monolithic Chalcogenide Optical Nanocomposites Enable Infrared System Innovation: Gradient Refractive Index Optics Kang, Myungkoo; Sisken, Laura; Lonergan, Charmayne Advanced Optical Materials, Vol. 8, Issue 10 https://doi.org/10.1002/adom.202000150	journal	March 2020
Refractive index patterning of infrared glass ceramics through laser-induced vitrification [Invited] Kang, Myungkoo; Sisken, Laura; Cook, Justin Optical Materials Express, Vol. 8, Issue 9 https://doi.org/10.1364/OME.8.002722	journal	August 2018
Spatial tailoring of the refractive index in infrared glass-ceramic films enabled by direct laser writing Mingareev, Ilya; Kang, Myungkoo; Truman, Mia Optics & Laser Technology, Vol. 126 https://doi.org/10.1016/j.optlastec.2020.106058	journal	June 2020
Tunable Visibly Transparent Optics Derived from Porous Silicon Ocier, Christian R.; Krueger, Neil A.; Zhou, Weijun ACS Photonics, Vol. 4, Issue 4 https://doi.org/10.1021/acsphotonics.6b01001	journal	March 2017
Porous Silicon Gradient Refractive Index Micro-Optics Krueger, Neil A.; Holsteen, Aaron L.; Kang, Seung-Kyun Nano Letters, Vol. 16, Issue 12 https://doi.org/10.1021/acs.nanolett.6b02939	journal	November 2016
Direct laser writing of volumetric gradient index lenses and waveguides Ocier, Christian R.; Richards, Corey A.; Bacon-Brown, Daniel A. Light: Science & Applications, Vol. 9, Issue 1 https://doi.org/10.1038/s41377-020-00431-3	journal	December 2020
Nanoimprinting of Refractive Index: Patterning Subwavelength Effective Media for Flat Optics Talukdar, Tahmid H.; Perez, Julius C.; Ryckman, Judson D. ACS Applied Nano Materials, Vol. 3, Issue 8 https://doi.org/10.1021/acsanm.0c01395	journal	July 2020
Strong, lightweight, and recoverable three-dimensional ceramic nanolattices Meza, L. R.; Das, S.; Greer, J. R. Science, Vol. 345, Issue 6202 https://doi.org/10.1126/science.1255908	journal	September 2014
Surface texture modulation via buckling in porous inclined mechanical metamaterials Fernandes, Matheus C.; Mhatre, Saurabh; Forte, Antonio E. Extreme Mechanics Letters, Vol. 51 https://doi.org/10.1016/j.eml.2021.101549	journal	February 2022
Three-dimensional Ultrathin Planar Lenses by Acoustic Metamaterials Li, Yong; Yu, Gaokun; Liang, Bin Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep06830	journal	October 2014
Perforated extensible 3-D hyperbolic secant lens antenna for directive antenna applications using additive manufacturing Shao, Wenyi; Sato, Hiroyasu; Li, Xiaotong Optics Express, Vol. 29, Issue 12 https://doi.org/10.1364/OE.426824	journal	June 2021
Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials Ryckman, Judson D.; Liscidini, Marco; Sipe, J. E. Nano Letters, Vol. 11, Issue 5 https://doi.org/10.1021/nl1028073	journal	May 2011
Three-dimensional patterning and morphological control of porous nanomaterials by gray-scale direct imprinting Ryckman, Judson D.; Jiao, Yang; Weiss, Sharon M. Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep01502	journal	March 2013
Porous silicon ring resonator for compact, high sensitivity biosensing applications Rodriguez, Gilberto A.; Hu, Shuren; Weiss, Sharon M. Optics Express, Vol. 23, Issue 6 https://doi.org/10.1364/OE.23.007111	journal	January 2015
Free-Carrier Electrorefraction and Electroabsorption Modulation Predictions for Silicon Over the 1–14- $\mu\hbox{m}$ Infrared Wavelength Range Nedeljkovic, M.; Soref, R.; Mashanovich, G. Z. IEEE Photonics Journal, Vol. 3, Issue 6 https://doi.org/10.1109/JPHOT.2011.2171930	journal	December 2011
Nanostructured silicon via metal assisted catalyzed etch (MACE): chemistry fundamentals and pattern engineering Toor, Fatima; Miller, Jeffrey B.; Davidson, Lauren M. Nanotechnology, Vol. 27, Issue 41 https://doi.org/10.1088/0957-4484/27/41/412003	journal	September 2016
Optical loss study of porous silicon and oxidized porous silicon planar waveguides Pirasteh, Parastesh; Charrier, Joël; Dumeige, Yannick Journal of Applied Physics, Vol. 101, Issue 8 https://doi.org/10.1063/1.2718886	journal	April 2007
Disposable (bio)chemical integrated optical waveguide sensors implemented on roll-to-roll produced platforms Aikio, Sanna; Zeilinger, Martin; Hiltunen, Jussi RSC Advances, Vol. 6, Issue 56 https://doi.org/10.1039/C6RA07320D	journal	January 2016
Multifunctional focusing and accelerating of light with a simple flat lens Talukdar, Tahmid H.; Ryckman, Judson D. Optics Express, Vol. 28, Issue 21 https://doi.org/10.1364/OE.402572	journal	September 2020
Observation of a large optical birefringence effect in a (110) oriented porous silicon layer Hakshur, K.; Ruschin, S. Applied Physics Letters, Vol. 104, Issue 5 https://doi.org/10.1063/1.4863746	journal	February 2014

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