Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering

Conference · Fri May 20 04:00:00 EDT 2022 · JACoW

DOI:https://doi.org/10.18429/JACoW-SRF2021-THPTEV015· OSTI ID:1898756

Sayeed, Md Nizam ^[1]; Côté, Claude ^[2]; Hani Elsayed-Ali, Hani Elsayed-Ali ^[1]; Eremeev, Grigory ^[3]; Farzad, Mohammadali ^[2]; Sarkissian, Andranik ^[2]; Valente-Feliciano, Anne-Marie ^[4]

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1. Old Dominion U.
2. INRS-Energie, Varennes, Canada
3. Fermilab
4. Jefferson Lab

Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.

• Research Organization: Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States); Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC), High Energy Physics (HEP) (SC-25)
• DOE Contract Number: AC02-07CH11359
• OSTI ID: 1898756
• Report Number(s): FERMILAB-CONF-22-828-TD; oai:inspirehep.net:2174350
• Conference Information: Journal Name: JACoW Journal Volume: SRF2021
• Country of Publication: United States
• Language: English

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