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Effect of substrate temperature on the growth of Nb3Sn film on Nb by multilayer sputtering

Journal Article · · Thin Solid Films
 [1];  [2];  [2];  [3];  [1]
  1. Old Dominion University, Norfolk, VA (United States)
  2. Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
  3. Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
Here, we report on the fabrication of niobium tin (Nb3Sn) films by multilayer sequential sputtering on niobium at substrate temperatures ranging from room temperature to 250 °C. The multilayers were then annealed inside a separate vacuum furnace at 950 °C for 3 h. The material properties of the films were characterized by X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and transmission electron microscopy. The superconducting properties of the films were studied by four-point probe resistivity measurements from room temperature to below the superconducting critical temperature Tc. The highest film Tc was 17.76 K, obtained when the multilayers were deposited at room temperature. When the deposition temperature was raised to 250 °C, a significant reduction in voids was achieved while the film's Tc was 17.58 K.
Research Organization:
Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States); Old Dominion Univ., Norfolk, VA (United States); Thomas Jefferson National Accelerator Facility, Newport News, VA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), High Energy Physics (HEP); USDOE Office of Science (SC), Nuclear Physics (NP)
Grant/Contract Number:
AC02-07CH11359; AC05-06OR23177; SC0022284
OSTI ID:
1897614
Alternate ID(s):
OSTI ID: 1908234
Report Number(s):
DOE/OR/23177-5420; JLAB-ACC-21-3559; arXiv:2109.07066
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 763; ISSN 0040-6090
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English

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