System, apparatus, and method for determining elemental composition using 4D STEM

Patent · Tue Apr 19 04:00:00 EDT 2022

OSTI ID:1892861

Bammes, Benjamin; Bilhorn, Robert

The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.

• Research Organization: Direct Electron, LP, San Diego, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: SC0018493
• Assignee: Direct Electron, LP (San Diego, CA)
• Patent Number(s): 11,310,438
• Application Number: 16/851,835
• OSTI ID: 1892861
• Country of Publication: United States
• Language: English