An integrable on-chip spectrometer, based on a transversely-chirped-grating waveguide-coupler for the 400- to 700-nm visible spectral range is demonstrated. For a fixed angle of incidence, the coupling wavelength is dependent on the local grating period and the waveguide structure. The transversely-chirped-input grating is fabricated on a SiO 2 -Si 3 N 4 -SiO 2 waveguide atop a Si substrate by interferometric lithography in two sections on a single silicon substrate. A uniform period grating, separated from the input coupler by a propagation region, is provided for out-coupling to a 2048 element CMOS detector array. The incident light with wavelength spanning 400- to 700-nm is coupled into waveguide at 33.5° through the chirped grating coupler. A resolution of ∼ 1.2 nm is demonstrated without any signal processing reconstruction.
@article{osti_1873955,
author = {Wang, Xuemei and Sasidharan, Vineeth and Neumann, Alexander and Zarkesh-Ha, Payman and Brueck, S. R. J.},
title = {Visible (400- to 700-nm) chirped-grating-coupled waveguide spectrometer},
annote = { An integrable on-chip spectrometer, based on a transversely-chirped-grating waveguide-coupler for the 400- to 700-nm visible spectral range is demonstrated. For a fixed angle of incidence, the coupling wavelength is dependent on the local grating period and the waveguide structure. The transversely-chirped-input grating is fabricated on a SiO 2 -Si 3 N 4 -SiO 2 waveguide atop a Si substrate by interferometric lithography in two sections on a single silicon substrate. A uniform period grating, separated from the input coupler by a propagation region, is provided for out-coupling to a 2048 element CMOS detector array. The incident light with wavelength spanning 400- to 700-nm is coupled into waveguide at 33.5° through the chirped grating coupler. A resolution of ∼ 1.2 nm is demonstrated without any signal processing reconstruction. },
doi = {10.1364/OE.462781},
url = {https://www.osti.gov/biblio/1873955},
journal = {Optics Express},
issn = {ISSN OPEXFF},
number = {14},
volume = {30},
place = {United States},
publisher = {Optical Society of America},
year = {2022},
month = {06}}
Fourth International Asia-Pacific Environmental Remote Sensing Symposium 2004: Remote Sensing of the Atmosphere, Ocean, Environment, and Space, SPIE Proceedingshttps://doi.org/10.1117/12.578497