Chirped-grating spectrometer-on-a-chip

Nezhadbadeh, Shima; Neumann, A.; Zarkesh-Ha, Payman; Brueck, S. R. J.

doi:10.1364/OE.398072

Chirped-grating spectrometer-on-a-chip

Journal Article · Tue Aug 04 04:00:00 EDT 2020 · Optics Express

DOI:https://doi.org/10.1364/OE.398072· OSTI ID:1645129

Nezhadbadeh, Shima; Neumann, A.; Zarkesh-Ha, Payman;

We demonstrate an on-chip spectrometer readily integrable with CMOS electronics. The structure is comprised of a SiO ₂ /Si ₃ N ₄ /SiO ₂ waveguide atop a silicon substrate. A transversely chirped grating is fabricated, in a single-step optical lithography process, on a portion of the waveguide to provide angle and wavelength dependent coupling to the guided mode. The spectral and angular information is encoded in the spatial dependence of the grating period. A uniform pitch grating area, separated from the collection area by an unpatterned propagation region, provides the out-coupling to a CMOS detector array. A resolution of 0.3 nm at 633 nm with a spectral coverage tunable across the visible and NIR (to ∼ 1 µm limited by the Si photodetector) by changing the angle of incidence, is demonstrated without the need for any signal processing deconvolution. This on-chip spectrometer concept will cost effectively enable a broad range of applications that are beyond the reach of current integrated spectroscopic technologies.

View Journal Article

Sponsoring Organization:: USDOE Advanced Research Projects Agency - Energy (ARPA-E)

Grant/Contract Number:: AR0000942; 89233218CNA000001; NA0003525

OSTI ID:: 1645129

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 17 Vol. 28; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

References (34)

Fluorescence Spectroscopy Measurement for Quality Assessment of Food Systems—a Review Karoui, Romdhane; Blecker, Christophe Food and Bioprocess Technology, Vol. 4, Issue 3 https://doi.org/10.1007/s11947-010-0370-0	journal	May 2010
Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films Peroz, C.; Dhuey, S.; Goltsov, A. Microelectronic Engineering, Vol. 88, Issue 8 https://doi.org/10.1016/j.mee.2010.12.078	journal	August 2011
Integrated photonic crystal spectrometers for sensing applications Momeni, Babak; Hosseini, Ehsan Shah; Askari, Murtaza Optics Communications, Vol. 282, Issue 15 https://doi.org/10.1016/j.optcom.2009.04.052	journal	August 2009
A colloidal quantum dot spectrometer Bao, Jie; Bawendi, Moungi G. Nature, Vol. 523, Issue 7558 https://doi.org/10.1038/nature14576	journal	July 2015
Compact spectrometer based on a disordered photonic chip Redding, Brandon; Liew, Seng Fatt; Sarma, Raktim Nature Photonics, Vol. 7, Issue 9 https://doi.org/10.1038/nphoton.2013.190	journal	July 2013
Fourier transform spectrometer on silicon with thermo-optic non-linearity and dispersion correction Souza, Mario C. M. M.; Grieco, Andrew; Frateschi, Newton C. Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03004-6	journal	February 2018
Compact folded metasurface spectrometer Faraji-Dana, MohammadSadegh; Arbabi, Ehsan; Arbabi, Amir Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-06495-5	journal	October 2018
High-performance and scalable on-chip digital Fourier transform spectroscopy Kita, Derek M.; Miranda, Brando; Favela, David Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-06773-2	journal	October 2018
Single-shot on-chip spectral sensors based on photonic crystal slabs Wang, Zhu; Yi, Soongyu; Chen, Ang Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-08994-5	journal	March 2019
Laser direct growth of graphene on silicon substrate Wei, Dapeng; Xu, Xianfan Applied Physics Letters, Vol. 100, Issue 2 https://doi.org/10.1063/1.3675636	journal	January 2012
MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range Wolffenbuttel, R. F. Journal of Micromechanics and Microengineering, Vol. 15, Issue 7 https://doi.org/10.1088/0960-1317/15/7/021	journal	June 2005
High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum Correia, J. H.; Bartek, M.; Wolffenbuttel, R. F. IEEE Transactions on Electron Devices, Vol. 47, Issue 3 https://doi.org/10.1109/16.824727	journal	March 2000
Design of Chirped Gratings Using Interferometric Lithography Benoit, Steve; Brueck, S. R. J. IEEE Photonics Journal, Vol. 10, Issue 2 https://doi.org/10.1109/JPHOT.2018.2815838	journal	April 2018
Silicon Nitride/Silicon Dioxide Echelle Grating Spectrometer for Operation Near 1.55 μm Xie, Shengjie; Meng, Yang; Bland-Hawthorn, Joss IEEE Photonics Journal, Vol. 10, Issue 6 https://doi.org/10.1109/JPHOT.2018.2880182	journal	December 2018
Optically Pumped Continuously Tunable Mid-IR Distributed-Feedback Semiconductor Laser He, Xiang; Benoit, Steve; Kaspi, Ron IEEE Journal of Quantum Electronics, Vol. 52, Issue 10 https://doi.org/10.1109/JQE.2016.2602564	journal	October 2016
Fully Integrated Optical Spectrometer in Visible and Near-IR in CMOS Hong, Lingyu; Sengupta, Kaushik IEEE Transactions on Biomedical Circuits and Systems, Vol. 11, Issue 6 https://doi.org/10.1109/TBCAS.2017.2774603	journal	December 2017
Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review Ebermann, Martin; Neumann, Norbert; Hiller, Karla SPIE OPTO, SPIE Proceedings https://doi.org/10.1117/12.2209288	conference	March 2016
Single-nanowire spectrometers Yang, Zongyin; Albrow-Owen, Tom; Cui, Hanxiao Science, Vol. 365, Issue 6457 https://doi.org/10.1126/science.aax8814	journal	September 2019
Surface-Enhanced Raman Spectroscopy Applied to Food Safety Craig, Ana Paula; Franca, Adriana S.; Irudayaraj, Joseph Annual Review of Food Science and Technology, Vol. 4, Issue 1 https://doi.org/10.1146/annurev-food-022811-101227	journal	February 2013
Process analytical applications of Raman spectroscopy Rantanen, Jukka Journal of Pharmacy and Pharmacology, Vol. 59, Issue 2 https://doi.org/10.1211/jpp.59.2.0004	journal	February 2007
Analysis of input-grating couplers having finite lengths Brazas, John C.; Li, Lifeng Applied Optics, Vol. 34, Issue 19 https://doi.org/10.1364/AO.34.003786	journal	January 1995
Chirped holographic grating used as the dispersive element in an optical spectrometer Fortin, Gilles; McCarthy, Nathalie Applied Optics, Vol. 44, Issue 23 https://doi.org/10.1364/AO.44.004874	journal	January 2005
A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides Cheben, P.; Schmid, J. H.; Delâge, A. Optics Express, Vol. 15, Issue 5 https://doi.org/10.1364/OE.15.002299	journal	January 2007
Photonic crystal spectrometer Pervez, Nadia K.; Cheng, Warren; Jia, Zhang Optics Express, Vol. 18, Issue 8 https://doi.org/10.1364/OE.18.008277	journal	January 2010
High resolution on-chip spectroscopy based on miniaturized microdonut resonators Xia, Zhixuan; Eftekhar, Ali Asghar; Soltani, Mohammad Optics Express, Vol. 19, Issue 13, p. 12356-12364 https://doi.org/10.1364/OE.19.012356	journal	January 2011
Computational spectrometer based on a broadband diffractive optic Wang, Peng; Menon, Rajesh Optics Express, Vol. 22, Issue 12 https://doi.org/10.1364/OE.22.014575	journal	January 2014
CMOS-compatible plenoptic detector for LED lighting applications Neumann, Alexander; Ghasemi, Javad; Nezhadbadeh, Shima Optics Express, Vol. 23, Issue 18 https://doi.org/10.1364/OE.23.023208	journal	January 2015
Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures Horie, Yu; Arbabi, Amir; Arbabi, Ehsan Optics Express, Vol. 24, Issue 11 https://doi.org/10.1364/OE.24.011677	journal	January 2016
Optical spectrometer based on continuously-chirped guided mode resonance filter Hung, Yung-Jr; Kao, Chia-Wei; Kao, Tzu-Chieh Optics Express, Vol. 26, Issue 21 https://doi.org/10.1364/OE.26.027515	journal	January 2018
Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors Pruessner, Marcel W.; Stievater, Todd H.; Rabinovich, William S. Optics Letters, Vol. 32, Issue 5 https://doi.org/10.1364/OL.32.000533	journal	January 2007
Concept of a high-resolution miniature spectrometer using an integrated filter array Wang, Shao-Wei; Xia, Changsheng; Chen, Xiaoshuang Optics Letters, Vol. 32, Issue 6, p. 632-634 https://doi.org/10.1364/OL.32.000632	journal	January 2007
High-resolution Fourier-transform spectrometer chip with microphotonic silicon spiral waveguides Velasco, Aitor V.; Cheben, Pavel; Bock, Przemek J. Optics Letters, Vol. 38, Issue 5 https://doi.org/10.1364/OL.38.000706	journal	January 2013
On-chip plasmonic spectrometer Tsur, Yuval; Arie, Ady Optics Letters, Vol. 41, Issue 15 https://doi.org/10.1364/OL.41.003523	journal	January 2016
Integrated Optic Sensing Spectrometer: Concept and Design Micó, Gloria; Gargallo, Bernardo; Pastor, Daniel Sensors, Vol. 19, Issue 5 https://doi.org/10.3390/s19051018	journal	February 2019

Similar Records

Visible (400- to 700-nm) chirped-grating-coupled waveguide spectrometer

Journal Article · Mon Jun 27 00:00:00 EDT 2022 · Optics Express · OSTI ID:1873955

Chirped holographic grating used as the dispersive element in an optical spectrometer

Journal Article · Wed Aug 10 00:00:00 EDT 2005 · Applied Optics · OSTI ID:20702615

Single-shot on-chip spectral sensors based on photonic crystal slabs

Journal Article · Sun Mar 03 23:00:00 EST 2019 · Nature Communications · OSTI ID:1624139

Chirped-grating spectrometer-on-a-chip

Citation Formats

References (34)

Similar Records

Related Subjects