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Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects.

Conference ·
DOI:https://doi.org/10.2172/1863854· OSTI ID:1863854
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1863854
Report Number(s):
SAND2021-4611C; 695587
Country of Publication:
United States
Language:
English

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