Ultimate Suppression of Thermal Transport in Amorphous Silicon Nitride by Phononic Nanostructure.

Tambo, Naoki; Liao, Yuxuan; Zhou, Chun; Ashley, Elizabeth Michiko; Takahashi, Kouhei; Nealey, Paul F.; Naito, Yasuyuki; Shiomi, Junichiro

doi:10.1126/sciadv.abc0075

Ultimate Suppression of Thermal Transport in Amorphous Silicon Nitride by Phononic Nanostructure.

Journal Article · Tue Sep 01 04:00:00 EDT 2020 · Science Advances

DOI:https://doi.org/10.1126/sciadv.abc0075· OSTI ID:1840694

Tambo, Naoki; Liao, Yuxuan; Zhou, Chun; Ashley, Elizabeth Michiko; Takahashi, Kouhei; Nealey, Paul F.; Naito, Yasuyuki; Shiomi, Junichiro

Engineering the thermal conductivity of amorphous materials is highly essential for the thermal management of future electronic devices. Here, we demonstrate the impact of ultrafine nanostructuring on the thermal conductivity reduction of amorphous silicon nitride (a-Si3N4) thin films, in which the thermal transport is inherently impeded by the atomic disorders. Ultrafine nanostructuring with feature sizes below 20 nm allows us to fully suppress contribution of the propagating vibrational modes (propagons), leaving only the diffusive vibrational modes (diffusons) to contribute to thermal transport in a-Si3N4. A combination of the phonon-gas kinetics model and the Allen-Feldmann theory reproduced the measured results without any fitting parameters. The thermal conductivity reduction was explained as extremely strong diffusive boundary scattering of both propagons and diffusIons. These findings give rise to substantial tunability of thermal conductivity of amorphous materials, which enables us to provide better thermal solutions in microelectronic devices.

Research Organization:: Argonne National Laboratory (ANL)

Sponsoring Organization:: Panasonic Corporation; Ministry of Education, Culture, Sports, Science and Technology (MEXT) of Japan; Japan Society for the Promotion of Science (JSPS) - KAKENHI

DOE Contract Number:: AC02-06CH11357

OSTI ID:: 1840694

Journal Information:: Science Advances, Journal Name: Science Advances Journal Issue: 39 Vol. 6; ISSN 2375-2548

Publisher:: AAAS

Country of Publication:: United States

Language:: English

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