High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays
A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.
- Research Organization:
- Eden Park Illumination, Champaign, IL (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- SC0007698
- Assignee:
- Eden Park Illumination (Champaign, IL)
- Patent Number(s):
- 11,004,673
- Application Number:
- 16/850,058
- OSTI ID:
- 1823947
- Country of Publication:
- United States
- Language:
- English
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