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Crystallographic Phosphoric Acid etching of GaN AlGaN and AlN Nanostructures.

Conference ·
OSTI ID:1821085

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1821085
Report Number(s):
SAND2020-9587C; 690525
Country of Publication:
United States
Language:
English

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