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422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

Journal Article · · Nature Communications
 [1];  [2];  [2];  [2];  [3];  [3];  [4];  [5];  [3];  [4];  [2]
  1. Honeywell International, Phoenix, AZ (United States); OSTI
  2. Univ. of California, Santa Barbara, CA (United States). Dept. of Electrical and Computer Engineering
  3. Yale Univ., New Haven, CT (United States). Dept. of Applied Physics
  4. Honeywell International, Phoenix, AZ (United States)
  5. Northern Arizona Univ., Flagstaff, AZ (United States). Dept. of Physics and Astronomy; Northern Arizona Univ., Flagstaff, AZ (United States). Center for Materials Interfaces in Research and Applications

High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m-1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

Sponsoring Organization:
USDOE Office of Science (SC); USDOE Advanced Research Projects Agency - Energy (ARPA-E); Defense Advanced Research Projects Agency (DARPA)
Grant/Contract Number:
AR0001042
OSTI ID:
1816759
Journal Information:
Nature Communications, Journal Name: Nature Communications Journal Issue: 1 Vol. 12; ISSN 2041-1723
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English

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