Materials loss measurements using superconducting microwave resonators

McRae, C. R.  H.; Wang, H.; Gao, J.; Vissers, M. R.; Brecht, T.; Dunsworth, A.; Pappas, D. P.; Mutus, J.

doi:10.1063/5.0017378

Title: Materials loss measurements using superconducting microwave resonators

Journal Article · Wed Sep 23 00:00:00 EDT 2020 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/5.0017378· OSTI ID:1803618

^[1];

^[1]; Vissers, M. R. ^[2];

^[3]; Dunsworth, A. ^[4]; Pappas, D. P. ^[2]; Mutus, J. ^[5]

Univ. of Colorado, Boulder, CO (United States); National Inst. of Standards and Technology (NIST), Boulder, CO (United States)
National Inst. of Standards and Technology (NIST), Boulder, CO (United States)
HRL Laboratories, Malibu, CA (United States)
Google, Inc., Mountain View, CA (United States)
Univ. of Colorado, Boulder, CO (United States); Google, Inc., Mountain View, CA (United States)

The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures. The identification of low loss fabrication techniques, materials, and thin film dielectrics is critical to achieving scalable architectures for superconducting quantum computing. Superconducting microwave resonators provide a convenient qubit proxy for assessing performance and studying TLS loss and other mechanisms relevant to superconducting circuits such as non-equilibrium quasiparticles and magnetic flux vortices. In this review article, we provide an overview of considerations for designing accurate resonator experiments to characterize loss, including applicable types of losses, cryogenic setup, device design, and methods for extracting material and interface losses, summarizing techniques that have been evolving for over two decades. Results from measurements of a wide variety of materials and processes are also summarized. Finally, we present recommendations for the reporting of loss data from superconducting microwave resonators to facilitate materials comparisons across the field.

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Research Organization:: Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: SC0019199; de-sc0019199

OSTI ID:: 1803618

Alternate ID(s):: OSTI ID: 1664566

Journal Information:: Review of Scientific Instruments, Vol. 91, Issue 9; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 65 works

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References (140)

Low loss superconducting titanium nitride coplanar waveguide resonators Vissers, M. R.; Gao, J.; Wisbey, D. S. Applied Physics Letters, Vol. 97, Issue 23 https://doi.org/10.1063/1.3517252	journal	December 2010
Low-loss superconducting resonant circuits using vacuum-gap-based microwave components Cicak, Katarina; Li, Dale; Strong, Joshua A. Applied Physics Letters, Vol. 96, Issue 9 https://doi.org/10.1063/1.3304168	journal	March 2010
Etch induced microwave losses in titanium nitride superconducting resonators Sandberg, Martin; Vissers, Michael R.; Kline, Jeffrey S. Applied Physics Letters, Vol. 100, Issue 26 https://doi.org/10.1063/1.4729623	journal	June 2012
Two-level states in glasses Phillips, W. A. Reports on Progress in Physics, Vol. 50, Issue 12 https://doi.org/10.1088/0034-4885/50/12/003	journal	December 1987
Quasiparticle Relaxation in Optically Excited High- $Q$ Superconducting Resonators Barends, R.; Baselmans, J. J. A.; Yates, S. J. C. Physical Review Letters, Vol. 100, Issue 25 https://doi.org/10.1103/PhysRevLett.100.257002	journal	June 2008
Bulk and surface loss in superconducting transmon qubits Dial, Oliver; McClure, Douglas T.; Poletto, Stefano Superconductor Science and Technology, Vol. 29, Issue 4 https://doi.org/10.1088/0953-2048/29/4/044001	journal	March 2016
Planar superconducting resonators with internal quality factors above one million Megrant, A.; Neill, C.; Barends, R. Applied Physics Letters, Vol. 100, Issue 11 https://doi.org/10.1063/1.3693409	journal	March 2012
Epitaxial Al ₂ O ₃ capacitors for low microwave loss superconducting quantum circuits Cho, K. -H.; Patel, U.; Podkaminer, J. APL Materials, Vol. 1, Issue 4 https://doi.org/10.1063/1.4822436	journal	October 2013
High-Coherence Fluxonium Qubit Nguyen, Long B.; Lin, Yen-Hsiang; Somoroff, Aaron Physical Review X, Vol. 9, Issue 4 https://doi.org/10.1103/physrevx.9.041041	journal	November 2019
High coherence superconducting microwave cavities with indium bump bonding Lei, Chan U.; Krayzman, Lev; Ganjam, Suhas Applied Physics Letters, Vol. 116, Issue 15 https://doi.org/10.1063/5.0003907	journal	April 2020
Study of loss in superconducting coplanar waveguide resonators Sage, Jeremy M.; Bolkhovsky, Vladimir; Oliver, William D. Journal of Applied Physics, Vol. 109, Issue 6 https://doi.org/10.1063/1.3552890	journal	March 2011
Analysis of high quality superconducting resonators: consequences for TLS properties in amorphous oxides Burnett, J.; Faoro, L.; Lindström, T. Superconductor Science and Technology, Vol. 29, Issue 4 https://doi.org/10.1088/0953-2048/29/4/044008	journal	March 2016
Microwave Packaging for Superconducting Qubits Lienhard, Benjamin; Gustavsson, Simon; Oliver, William D. 2019 IEEE/MTT-S International Microwave Symposium - IMS 2019, 2019 IEEE MTT-S International Microwave Symposium (IMS) https://doi.org/10.1109/MWSYM.2019.8701119	conference	June 2019
Implementing the Quantum von Neumann Architecture with Superconducting Circuits Mariantoni, M.; Wang, H.; Yamamoto, T. Science, Vol. 334, Issue 6052 https://doi.org/10.1126/science.1208517	journal	September 2011
Coherent quantum state storage and transfer between two phase qubits via a resonant cavity Sillanpää, Mika A.; Park, Jae I.; Simmonds, Raymond W. Nature, Vol. 449, Issue 7161 https://doi.org/10.1038/nature06124	journal	September 2007
Anomalous low-temperature thermal properties of glasses and spin glasses Anderson, P. w.; Halperin, B. I.; Varma, c. M. Philosophical Magazine, Vol. 25, Issue 1 https://doi.org/10.1080/14786437208229210	journal	January 1972
Wirebond crosstalk and cavity modes in large chip mounts for superconducting qubits Wenner, J.; Neeley, M.; Bialczak, Radoslaw C. Superconductor Science and Technology, Vol. 24, Issue 6 https://doi.org/10.1088/0953-2048/24/6/065001	journal	March 2011
Mitigation of cosmic ray effect on microwave kinetic inductance detector arrays Karatsu, K.; Endo, A.; Bueno, J. Applied Physics Letters, Vol. 114, Issue 3 https://doi.org/10.1063/1.5052419	journal	January 2019
Towards understanding two-level-systems in amorphous solids: insights from quantum circuits Müller, Clemens; Cole, Jared H.; Lisenfeld, Jürgen Reports on Progress in Physics, Vol. 82, Issue 12 https://doi.org/10.1088/1361-6633/ab3a7e	journal	October 2019
Determining Interface Dielectric Losses in Superconducting Coplanar-Waveguide Resonators Woods, W.; Calusine, G.; Melville, A. Physical Review Applied, Vol. 12, Issue 1 https://doi.org/10.1103/PhysRevApplied.12.014012	journal	July 2019
Noise and loss of superconducting aluminium resonators at single photon energies Burnett, Jonathan; Bengtsson, Andreas; Niepce, David Journal of Physics: Conference Series, Vol. 969 https://doi.org/10.1088/1742-6596/969/1/012131	journal	March 2018
Reduced microwave loss in trenched superconducting coplanar waveguides Vissers, Michael R.; Kline, Jeffrey S.; Gao, Jiansong Applied Physics Letters, Vol. 100, Issue 8 https://doi.org/10.1063/1.3683552	journal	February 2012
Engineering cryogenic setups for 100-qubit scale superconducting circuit systems Krinner, S.; Storz, S.; Kurpiers, P. EPJ Quantum Technology, Vol. 6, Issue 1 https://doi.org/10.1140/epjqt/s40507-019-0072-0	journal	May 2019
Invited Article: Dielectric material characterization techniques and designs of high-Q resonators for applications from micro to millimeter-waves frequencies applicable at room and cryogenic temperatures Le Floch, Jean-Michel; Fan, Y.; Humbert, Georges Review of Scientific Instruments, Vol. 85, Issue 3 https://doi.org/10.1063/1.4867461	journal	March 2014
Atomic layer deposition of titanium nitride for quantum circuits Shearrow, Abigail; Koolstra, Gerwin; Whiteley, Samuel J. Applied Physics Letters, Vol. 113, Issue 21 https://doi.org/10.1063/1.5053461	journal	November 2018
A Josephson junction defect spectrometer for measuring two-level systems Stoutimore, M. J. A.; Khalil, M. S.; Lobb, C. J. Applied Physics Letters, Vol. 101, Issue 6 https://doi.org/10.1063/1.4744901	journal	August 2012
Measurement of dielectric losses in amorphous thin films at gigahertz frequencies using superconducting resonators Kaiser, Ch; Skacel, S. T.; Wünsch, S. Superconductor Science and Technology, Vol. 23, Issue 7 https://doi.org/10.1088/0953-2048/23/7/075008	journal	June 2010
Measurement of the dielectric properties of high-purity sapphire at 1.865 GHZ from 2-10 Kelvin Pogue, N.; McIntyre, P.; Sattarov, Akhdiyor ADVANCES IN CRYOGENIC ENGINEERING: Transactions of the Cryogenic Engineering Conference - CEC, Volume 57, AIP Conference Proceedings https://doi.org/10.1063/1.4707011	conference	January 2012
Phononic loss in superconducting resonators on piezoelectric substrates Scigliuzzo, Marco; Bruhat, Laure E.; Bengtsson, Andreas New Journal of Physics, Vol. 22, Issue 5 https://doi.org/10.1088/1367-2630/ab8044	journal	May 2020
Noise properties of superconducting coplanar waveguide microwave resonators Gao, Jiansong; Zmuidzinas, Jonas; Mazin, Benjamin A. Applied Physics Letters, Vol. 90, Issue 10 https://doi.org/10.1063/1.2711770	journal	March 2007
Minimizing quasiparticle generation from stray infrared light in superconducting quantum circuits Barends, R.; Wenner, J.; Lenander, M. Applied Physics Letters, Vol. 99, Issue 11 https://doi.org/10.1063/1.3638063	journal	September 2011
Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators McRae, C. R. H.; Béjanin, J. H.; Earnest, C. T. Journal of Applied Physics, Vol. 123, Issue 20 https://doi.org/10.1063/1.5020514	journal	May 2018
Quantum supremacy using a programmable superconducting processor Arute, Frank; Arya, Kunal; Babbush, Ryan Nature, Vol. 574, Issue 7779 https://doi.org/10.1038/s41586-019-1666-5	journal	October 2019
Synthesizing arbitrary quantum states in a superconducting resonator Hofheinz, Max; Wang, H.; Ansmann, M. Nature, Vol. 459, Issue 7246 https://doi.org/10.1038/nature08005	journal	May 2009
Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers Duff, S. M.; Austermann, J.; Beall, J. A. Journal of Low Temperature Physics, Vol. 184, Issue 3-4 https://doi.org/10.1007/s10909-016-1576-y	journal	March 2016
Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing Lewis, Rupert M.; Henry, Michael David; Schroeder, Katlin IEEE Transactions on Applied Superconductivity, Vol. 27, Issue 4 https://doi.org/10.1109/tasc.2017.2672719	journal	June 2017
Manufacturing low dissipation superconducting quantum processors Nersisyan, Ani; Sete, Eyob A.; Stanwyck, Sam 2019 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM19573.2019.8993458	conference	December 2019
Surface participation and dielectric loss in superconducting qubits Wang, C.; Axline, C.; Gao, Y. Y. Applied Physics Letters, Vol. 107, Issue 16 https://doi.org/10.1063/1.4934486	journal	October 2015
Microwave attenuators for use with quantum devices below 100 mK Yeh, Jen-Hao; LeFebvre, Jay; Premaratne, Shavindra Journal of Applied Physics, Vol. 121, Issue 22 https://doi.org/10.1063/1.4984894	journal	June 2017
Fabrication artifacts and parallel loss channels in metamorphic epitaxial aluminum superconducting resonators Richardson, C. J. K.; Siwak, N. P.; Hackley, J. Superconductor Science and Technology, Vol. 29, Issue 6 https://doi.org/10.1088/0953-2048/29/6/064003	journal	April 2016
Effect of metal/substrate interfaces on radio-frequency loss in superconducting coplanar waveguides Wisbey, David S.; Gao, Jiansong; Vissers, Michael R. Journal of Applied Physics, Vol. 108, Issue 9 https://doi.org/10.1063/1.3499608	journal	November 2010
Losses in coplanar waveguide resonators at millikelvin temperatures Macha, P.; van der Ploeg, S. H. W.; Oelsner, G. Applied Physics Letters, Vol. 96, Issue 6 https://doi.org/10.1063/1.3309754	journal	February 2010
Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators Ohya, S.; Chiaro, B.; Megrant, A. Superconductor Science and Technology, Vol. 27, Issue 1 https://doi.org/10.1088/0953-2048/27/1/015009	journal	December 2013
Probing the density of states of two-level tunneling systems in silicon oxide films using superconducting lumped element resonators Skacel, S. T.; Kaiser, Ch.; Wuensch, S. Applied Physics Letters, Vol. 106, Issue 2 https://doi.org/10.1063/1.4905149	journal	January 2015
Coplanar waveguide resonators for circuit quantum electrodynamics Göppl, M.; Fragner, A.; Baur, M. Journal of Applied Physics, Vol. 104, Issue 11 https://doi.org/10.1063/1.3010859	journal	December 2008
Temperature dependence of the frequency and noise of superconducting coplanar waveguide resonators Kumar, Shwetank; Gao, Jiansong; Zmuidzinas, Jonas Applied Physics Letters, Vol. 92, Issue 12 https://doi.org/10.1063/1.2894584	journal	March 2008
Improving the quality factor of microwave compact resonators by optimizing their geometrical parameters Geerlings, K.; Shankar, S.; Edwards, E. Applied Physics Letters, Vol. 100, Issue 19 https://doi.org/10.1063/1.4710520	journal	May 2012
3D integrated superconducting qubits Rosenberg, D.; Kim, D.; Das, R. npj Quantum Information, Vol. 3, Issue 1 https://doi.org/10.1038/s41534-017-0044-0	journal	October 2017
Improving the coherence time of superconducting coplanar resonators Wang, H.; Hofheinz, M.; Wenner, J. Applied Physics Letters, Vol. 95, Issue 23 https://doi.org/10.1063/1.3273372	journal	December 2009
Using Surface Engineering to Modulate Superconducting Coplanar Microwave Resonator Performance Lock, Evgeniya H.; Xu, Peng; Kohler, Timothy IEEE Transactions on Applied Superconductivity, Vol. 29, Issue 6 https://doi.org/10.1109/tasc.2019.2891883	journal	September 2019
Fabrication and characterization of aluminum airbridges for superconducting microwave circuits Chen, Zijun; Megrant, A.; Kelly, J. Applied Physics Letters, Vol. 104, Issue 5 https://doi.org/10.1063/1.4863745	journal	February 2014
Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators Gao, Jiansong; Daal, Miguel; Vayonakis, Anastasios Applied Physics Letters, Vol. 92, Issue 15 https://doi.org/10.1063/1.2906373	journal	April 2008
Use of whispering-gallery modes for complex permittivity determinations of ultra-low-loss dielectric materials Krupka, J.; Derzakowski, K.; Abramowicz, A. IEEE Transactions on Microwave Theory and Techniques, Vol. 47, Issue 6 https://doi.org/10.1109/22.769347	journal	June 1999
Comparison of SOLR and TRL Calibrations Walker, David K.; Williams, Dylan F. 51st ARFTG Conference Digest https://doi.org/10.1109/ARFTG.1998.327283	conference	June 1998
Radiation-suppressed superconducting quantum bit in a planar geometry Sandberg, Martin; Vissers, Michael R.; Ohki, Thomas A. Applied Physics Letters, Vol. 102, Issue 7 https://doi.org/10.1063/1.4792698	journal	February 2013
Two-port microwave calibration at millikelvin temperatures Ranzani, Leonardo; Spietz, Lafe; Popovic, Zoya Review of Scientific Instruments, Vol. 84, Issue 3 https://doi.org/10.1063/1.4794910	journal	March 2013
Phase-preserving amplification near the quantum limit with a Josephson ring modulator Bergeal, N.; Schackert, F.; Metcalfe, M. Nature, Vol. 465, Issue 7294 https://doi.org/10.1038/nature09035	journal	May 2010
An analysis method for asymmetric resonator transmission applied to superconducting devices Khalil, M. S.; Stoutimore, M. J. A.; Wellstood, F. C. Journal of Applied Physics, Vol. 111, Issue 5 https://doi.org/10.1063/1.3692073	journal	March 2012
Measurement of resonant frequency and quality factor of microwave resonators: Comparison of methods Petersan, Paul J.; Anlage, Steven M. Journal of Applied Physics, Vol. 84, Issue 6 https://doi.org/10.1063/1.368498	journal	September 1998
Suppression of low-frequency charge noise in superconducting resonators by surface spin desorption de Graaf, S. E.; Faoro, L.; Burnett, J. Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03577-2	journal	March 2018
Reducing microwave loss in superconducting resonators due to trapped vortices Song, C.; DeFeo, M. P.; Yu, K. Applied Physics Letters, Vol. 95, Issue 23 https://doi.org/10.1063/1.3271523	journal	December 2009
Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates Bruno, A.; de Lange, G.; Asaad, S. Applied Physics Letters, Vol. 106, Issue 18 https://doi.org/10.1063/1.4919761	journal	May 2015
Qubit compatible superconducting interconnects Foxen, B.; Mutus, J. Y.; Lucero, E. Quantum Science and Technology, Vol. 3, Issue 1 https://doi.org/10.1088/2058-9565/aa94fc	journal	November 2017
Identifying capacitive and inductive loss in lumped element superconducting hybrid titanium nitride/aluminum resonators Vissers, Michael R.; Weides, Martin P.; Kline, Jeffrey S. Applied Physics Letters, Vol. 101, Issue 2 https://doi.org/10.1063/1.4730389	journal	July 2012
Quantum supremacy using a programmable superconducting processor Martinis, John; Boixo, Sergio; Neven, Hartmut Dryad https://doi.org/10.5061/dryad.k6t1rj8	dataset	January 2019
Efficient and robust analysis of complex scattering data under noise in microwave resonators Probst, S.; Song, F. B.; Bushev, P. A. Review of Scientific Instruments, Vol. 86, Issue 2 https://doi.org/10.1063/1.4907935	journal	February 2015
Dielectric loss extraction for superconducting microwave resonators McRae, C. R. H.; Lake, R. E.; Long, J. L. Applied Physics Letters, Vol. 116, Issue 19 https://doi.org/10.1063/5.0004622	journal	May 2020
Reaching 10 ms single photon lifetimes for superconducting aluminum cavities Reagor, Matthew; Paik, Hanhee; Catelani, Gianluigi Applied Physics Letters, Vol. 102, Issue 19 https://doi.org/10.1063/1.4807015	journal	May 2013
Multilayer microwave integrated quantum circuits for scalable quantum computing Brecht, Teresa; Pfaff, Wolfgang; Wang, Chen npj Quantum Information, Vol. 2, Issue 1 https://doi.org/10.1038/npjqi.2016.2	journal	February 2016
Superconducting Microresonators: Physics and Applications Zmuidzinas, Jonas Annual Review of Condensed Matter Physics, Vol. 3, Issue 1 https://doi.org/10.1146/annurev-conmatphys-020911-125022	journal	March 2012
Substrate surface engineering for high-quality silicon/aluminum superconducting resonators Earnest, C. T.; Béjanin, J. H.; McConkey, T. G. Superconductor Science and Technology, Vol. 31, Issue 12 https://doi.org/10.1088/1361-6668/aae548	journal	November 2018
Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits Abuwasib, Mohammad; Krantz, Philip; Delsing, Per Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 3 https://doi.org/10.1116/1.4798399	journal	May 2013
Widely tunable parametric amplifier based on a superconducting quantum interference device array resonator Castellanos-Beltran, M. A.; Lehnert, K. W. Applied Physics Letters, Vol. 91, Issue 8 https://doi.org/10.1063/1.2773988	journal	August 2007
Improving the performance of superconducting microwave resonators in magnetic fields Bothner, D.; Gaber, T.; Kemmler, M. Applied Physics Letters, Vol. 98, Issue 10 https://doi.org/10.1063/1.3560480	journal	March 2011
Decoherence in Josephson Qubits from Dielectric Loss Martinis, John M.; Cooper, K. B.; McDermott, R. Physical Review Letters, Vol. 95, Issue 21 https://doi.org/10.1103/physrevlett.95.210503	journal	November 2005
Microwave dielectric loss at single photon energies and millikelvin temperatures O’Connell, Aaron D.; Ansmann, M.; Bialczak, R. C. Applied Physics Letters, Vol. 92, Issue 11 https://doi.org/10.1063/1.2898887	journal	March 2008
Characterization of low-temperature microwave loss of thin aluminum oxide formed by plasma oxidation Deng, Chunqing; Otto, M.; Lupascu, A. Applied Physics Letters, Vol. 104, Issue 4 https://doi.org/10.1063/1.4863686	journal	January 2014
Strong coupling of a single photon to a superconducting qubit using circuit quantum electrodynamics Wallraff, A.; Schuster, D. I.; Blais, A. Nature, Vol. 431, Issue 7005 https://doi.org/10.1038/nature02851	journal	September 2004
Characterization of hidden modes in networks of superconducting qubits Sheldon, Sarah; Sandberg, Martin; Paik, Hanhee Applied Physics Letters, Vol. 111, Issue 22 https://doi.org/10.1063/1.4990033	journal	November 2017
Traveling wave parametric amplifier with Josephson junctions using minimal resonator phase matching White, T. C.; Mutus, J. Y.; Hoi, I. -C. Applied Physics Letters, Vol. 106, Issue 24 https://doi.org/10.1063/1.4922348	journal	June 2015
Geometric scaling of two-level-system loss in superconducting resonators Niepce, David; Burnett, Jonathan J.; Latorre, Martí Gutierrez Superconductor Science and Technology, Vol. 33, Issue 2 https://doi.org/10.1088/1361-6668/ab6179	journal	January 2020
Solid-State Qubits: 3D Integration and Packaging Rosenberg, Danna; Weber, Steven J.; Conway, David IEEE Microwave Magazine, Vol. 21, Issue 8 https://doi.org/10.1109/MMM.2020.2993478	journal	August 2020
Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits Quintana, C. M.; Megrant, A.; Chen, Z. Applied Physics Letters, Vol. 105, Issue 6 https://doi.org/10.1063/1.4893297	journal	August 2014
Demonstration of superconducting micromachined cavities Brecht, T.; Reagor, M.; Chu, Y. Applied Physics Letters, Vol. 107, Issue 19 https://doi.org/10.1063/1.4935541	journal	November 2015
Planar superconducting whispering gallery mode resonators Minev, Z. K.; Pop, I. M.; Devoret, M. H. Applied Physics Letters, Vol. 103, Issue 14 https://doi.org/10.1063/1.4824201	journal	September 2013
Protecting superconducting qubits from radiation Córcoles, Antonio D.; Chow, Jerry M.; Gambetta, Jay M. Applied Physics Letters, Vol. 99, Issue 18 https://doi.org/10.1063/1.3658630	journal	October 2011
Properties of superconducting planar resonators at millikelvin temperatures Lindström, T.; Healey, J. E.; Colclough, M. S. Physical Review B, Vol. 80, Issue 13 https://doi.org/10.1103/physrevb.80.132501	journal	October 2009
Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators Calusine, G.; Melville, A.; Woods, W. Applied Physics Letters, Vol. 112, Issue 6 https://doi.org/10.1063/1.5006888	journal	February 2018
Impact of ionizing radiation on superconducting qubit coherence Vepsäläinen, Antti P.; Karamlou, Amir H.; Orrell, John L. Nature, Vol. 584, Issue 7822 https://doi.org/10.1038/s41586-020-2619-8	journal	August 2020
An analysis method for transmission measurements of superconducting resonators with applications to quantum-regime dielectric-loss measurements Deng, Chunqing; Otto, Martin; Lupascu, Adrian Journal of Applied Physics, Vol. 114, Issue 5 https://doi.org/10.1063/1.4817512	journal	August 2013
Transmission-line resonators for the study of individual two-level tunneling systems Brehm, Jan David; Bilmes, Alexander; Weiss, Georg Applied Physics Letters, Vol. 111, Issue 11 https://doi.org/10.1063/1.5001920	journal	September 2017
New Method for Determining the Quality Factor and Resonance Frequency of Superconducting Micro-Resonators from Sonnet Simulations Wisbey, D. S.; Martin, A.; Reinisch, A. Journal of Low Temperature Physics, Vol. 176, Issue 3-4 https://doi.org/10.1007/s10909-014-1099-3	journal	May 2014
Slow noise processes in superconducting resonators Burnett, J.; Lindström, T.; Oxborrow, M. Physical Review B, Vol. 87, Issue 14 https://doi.org/10.1103/physrevb.87.140501	journal	April 2013
Coherence in a transmon qubit with epitaxial tunnel junctions Weides, Martin P.; Kline, Jeffrey S.; Vissers, Michael R. Applied Physics Letters, Vol. 99, Issue 26 https://doi.org/10.1063/1.3672000	journal	December 2011
Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits Paik, Hanhee; Osborn, Kevin D. Applied Physics Letters, Vol. 96, Issue 7 https://doi.org/10.1063/1.3309703	journal	February 2010
Loss mechanisms in superconducting thin film microwave resonators Goetz, Jan; Deppe, Frank; Haeberlein, Max Journal of Applied Physics, Vol. 119, Issue 1 https://doi.org/10.1063/1.4939299	journal	January 2016
Optimization of infrared and magnetic shielding of superconducting TiN and Al coplanar microwave resonators Kreikebaum, J. M.; Dove, A.; Livingston, W. Superconductor Science and Technology, Vol. 29, Issue 10 https://doi.org/10.1088/0953-2048/29/10/104002	journal	August 2016
Non-equilibrium superconductivity in quantum-sensing superconducting resonators Goldie, D. J.; Withington, S. Superconductor Science and Technology, Vol. 26, Issue 1 https://doi.org/10.1088/0953-2048/26/1/015004	journal	November 2012
Dielectric surface loss in superconducting resonators with flux-trapping holes Chiaro, B.; Megrant, A.; Dunsworth, A. Superconductor Science and Technology, Vol. 29, Issue 10 https://doi.org/10.1088/0953-2048/29/10/104006	journal	August 2016
Dielectric Loss of Boron-Based Dielectrics on Niobium Resonators Wisbey, David S.; Vissers, Michael R.; Gao, Jiansong Journal of Low Temperature Physics, Vol. 195, Issue 5-6 https://doi.org/10.1007/s10909-019-02183-w	journal	March 2019
Strongly quadrature-dependent noise in superconducting microresonators measured at the vacuum-noise limit Gao, J.; Vale, L. R.; Mates, J. A. B. Applied Physics Letters, Vol. 98, Issue 23 https://doi.org/10.1063/1.3597156	journal	June 2011
Mitigating leakage errors due to cavity modes in a superconducting quantum computer McConkey, T. G.; Béjanin, J. H.; Earnest, C. T. Quantum Science and Technology, Vol. 3, Issue 3 https://doi.org/10.1088/2058-9565/aabd41	journal	May 2018
Measurement and control of quasiparticle dynamics in a superconducting qubit Wang, C.; Gao, Y. Y.; Pop, I. M. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6836	journal	December 2014
Quantum-limited heat conduction over macroscopic distances Partanen, Matti; Tan, Kuan Yen; Govenius, Joonas Nature Physics, Vol. 12, Issue 5 https://doi.org/10.1038/nphys3642	journal	February 2016
Measurement of loss in superconducting microstrip at millimeter-wave frequencies Gao, Jiansong; Vayonakis, Anastasios; Noroozian, Omid THE THIRTEENTH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE DETECTORS—LTD13, AIP Conference Proceedings https://doi.org/10.1063/1.3292306	conference	January 2009
High coherence plane breaking packaging for superconducting qubits Bronn, Nicholas T.; Adiga, Vivekananda P.; Olivadese, Salvatore B. Quantum Science and Technology, Vol. 3, Issue 2 https://doi.org/10.1088/2058-9565/aaa645	journal	February 2018
A method for building low loss multi-layer wiring for superconducting microwave devices Dunsworth, A.; Barends, R.; Chen, Yu Applied Physics Letters, Vol. 112, Issue 6 https://doi.org/10.1063/1.5014033	journal	February 2018
A semiempirical model for two-level system noise in superconducting microresonators Gao, Jiansong; Daal, Miguel; Martinis, John M. Applied Physics Letters, Vol. 92, Issue 21 https://doi.org/10.1063/1.2937855	journal	May 2008
Fluctuations from edge defects in superconducting resonators Neill, C.; Megrant, A.; Barends, R. Applied Physics Letters, Vol. 103, Issue 7 https://doi.org/10.1063/1.4818710	journal	August 2013
Improved superconducting qubit coherence using titanium nitride Chang, Josephine B.; Vissers, Michael R.; Córcoles, Antonio D. Applied Physics Letters, Vol. 103, Issue 1 https://doi.org/10.1063/1.4813269	journal	July 2013
Minimal resonator loss for circuit quantum electrodynamics Barends, R.; Vercruyssen, N.; Endo, A. Applied Physics Letters, Vol. 97, Issue 2 https://doi.org/10.1063/1.3458705	journal	July 2010
Quasiparticle relaxation in optically excited high-Q superconducting resonators Barends, R.; Baselmans, J. J. A.; Yates, S. J. C. arXiv https://doi.org/10.48550/arxiv.0802.0640	text	January 2008
Microwave Dielectric Loss at Single Photon Energies and milliKelvin Temperatures O'Connell, Aaron D.; Ansmann, M.; Bialczak, R. C. arXiv https://doi.org/10.48550/arxiv.0802.2404	text	January 2008
Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators Gao, Jiansong; Daal, Miguel; Day, Peter arXiv https://doi.org/10.48550/arxiv.0802.4457	text	January 2008
On the properties of superconducting planar resonators at mK temperatures Lindstrom, T.; Healey, J. E.; Colclough, M. S. arXiv https://doi.org/10.48550/arxiv.0905.1481	text	January 2009
Improving the Coherence Time of Superconducting Coplanar Resonators Wang, H.; Hofheinz, M.; Wenner, J. arXiv https://doi.org/10.48550/arxiv.0909.0547	text	January 2009
Losses in coplanar waveguide resonators at millikelvin temperatures Macha, P.; van der Ploeg, S. H. W.; Oelsner, G. arXiv https://doi.org/10.48550/arxiv.0910.0685	text	January 2009
Improving the performance of superconducting microwave resonators in magnetic fields Bothner, Daniel; Gaber, Tobias; Kemmler, Matthias arXiv https://doi.org/10.48550/arxiv.1101.3185	text	January 2011
An analysis method for asymmetric resonator transmission applied to superconducting devices Khalil, M. S.; Stoutimore, M. J. A.; Wellstood, F. C. arXiv https://doi.org/10.48550/arxiv.1108.3117	text	January 2011
Coherence in a transmon qubit with epitaxial tunnel junctions Weides, Martin P.; Kline, Jeffrey S.; Vissers, Michael R. arXiv https://doi.org/10.48550/arxiv.1111.5083	text	January 2011
Planar Superconducting Resonators with Internal Quality Factors above One Million Megrant, A.; Neill, C.; Barends, R. arXiv https://doi.org/10.48550/arxiv.1201.3384	text	January 2012
Non-equilibrium superconductivity in superconducting resonators Goldie, D. J.; Withington, S. arXiv https://doi.org/10.48550/arxiv.1208.0685	text	January 2012
Coherent Josephson qubit suitable for scalable quantum integrated circuits Barends, R.; Kelly, J.; Megrant, A. arXiv https://doi.org/10.48550/arxiv.1304.2322	text	January 2013
Sputtered TiN films for superconducting coplanar waveguide resonators Ohya, Shinobu; Chiaro, Ben; Megrant, Anthony arXiv https://doi.org/10.48550/arxiv.1306.2966	preprint	January 2013
Fluctuations From Edge Defects in Superconducting Resonators Neill, C.; Megrant, A.; Barends, R. arXiv https://doi.org/10.48550/arxiv.1306.3718	text	January 2013
Efficient and robust analysis of complex scattering data under noise in microwave resonators Probst, S.; Song, F. B.; Bushev, P. A. arXiv https://doi.org/10.48550/arxiv.1410.3365	text	January 2014
Demonstration of superconducting micromachined cavities Brecht, T.; Reagor, M.; Chu, Y. arXiv https://doi.org/10.48550/arxiv.1509.01119	preprint	January 2015
Surface participation and dielectric loss in superconducting qubits Wang, Chen; Axline, Christopher; Gao, Yvonne Y. arXiv https://doi.org/10.48550/arxiv.1509.01854	text	January 2015
Analysis of high quality superconducting resonators: consequences for TLS properties in amorphous oxides Burnett, Jonathan; Faoro, Lara; Lindstrom, Tobias arXiv https://doi.org/10.48550/arxiv.1512.02553	text	January 2015
The Quantum Socket: Three-Dimensional Wiring for Extensible Quantum Computing Béjanin, J. H.; McConkey, T. G.; Rinehart, J. R. arXiv https://doi.org/10.48550/arxiv.1606.00063	text	January 2016
Dielectric surface loss in superconducting resonators with flux-trapping holes Chiaro, B.; Megrant, A.; Dunsworth, A. arXiv https://doi.org/10.48550/arxiv.1607.05841	text	January 2016
Optimization of infrared and magnetic shielding of superconducting TiN and Al coplanar microwave resonators Kreikebaum, John Mark; Dove, Allison; Livingston, William arXiv https://doi.org/10.48550/arxiv.1608.06273	text	January 2016
Superconducting Through-Silicon Vias for Quantum Integrated Circuits Vahidpour, Mehrnoosh; O'Brien, William; Whyland, Jon Tyler arXiv https://doi.org/10.48550/arxiv.1708.02226	preprint	January 2017
Transmission-line resonators for the study of individual two-level tunneling systems Brehm, Jan David; Bilmes, Alexander; Weiss, Georg arXiv https://doi.org/10.48550/arxiv.1709.00381	text	January 2017
Cavity Attenuators for Superconducting Qubits Wang, Z.; Shankar, S.; Minev, Z. K. arXiv https://doi.org/10.48550/arxiv.1807.04849	text	January 2018
Atomic layer deposition of titanium nitride for quantum circuits Shearrow, A.; Koolstra, G.; Whiteley, S. J. arXiv https://doi.org/10.48550/arxiv.1808.06009	text	January 2018
Geometric Scaling of Two-Level-System Loss in Superconducting Resonators Niepce, David; Burnett, Jonathan; Latorre, Martí Gutierrez arXiv https://doi.org/10.48550/arxiv.1908.02606	text	January 2019
High coherence superconducting microwave cavities with indium bump bonding Lei, Chan U.; Krayzman, Lev; Ganjam, Suhas arXiv https://doi.org/10.48550/arxiv.2001.09216	text	January 2020
Reducing the impact of radioactivity on quantum circuits in a deep-underground facility Cardani, Laura; Valenti, Francesco; Casali, Nicola arXiv https://doi.org/10.48550/arxiv.2005.02286	text	January 2020
Measurement of Resonant Frequency and Quality Factor of Microwave Resonators: Comparison of Methods Petersan, Paul J.; Anlage, Steven M. arXiv https://doi.org/10.48550/arxiv.cond-mat/9805365	text	January 1998

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