Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf0.5Zr0.5O2 Thin Films

Fields, Shelby S.; Smith, Sean W.; Fancher, Chris M.; Henry, Michael David; Wolfley, Steve L.; Sales, Maria G.; Jaszewski, Samantha T.; Rodriguez, Mark A.; Esteves, Giovanni; Davids, Paul S.; McDonnell, Stephen J.; Ihlefeld, Jon F.

doi:10.1002/admi.202100018

Title: Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films

Journal Article · Tue Mar 23 00:00:00 EDT 2021 · Advanced Materials Interfaces

DOI:https://doi.org/10.1002/admi.202100018· OSTI ID:1779120

^[1]; Smith, Sean W. ^[2];

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^[2]; Wolfley, Steve L. ^[2]; Sales, Maria G. ^[1];

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Univ. of Virginia, Charlottesville, VA (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC); National Science Foundation (NSF)

Grant/Contract Number:: AC05-00OR22725; NA0003525; DMR-1626201; DGE-1842490; AC04-94AL85000; DE‐NA‐0003525

OSTI ID:: 1779120

Alternate ID(s):: OSTI ID: 1781573; OSTI ID: 1785766

Report Number(s):: SAND-2021-5021J

Journal Information:: Advanced Materials Interfaces, Vol. 8, Issue 10; ISSN 2196-7350

Publisher:: Wiley-VCHCopyright Statement

Country of Publication:: United States

Language:: English

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37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
ferroelectrics
hafnium zirconium oxide
metal nitride electrodes
oxygen vacancies
stress

Title: Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf0.5Zr0.5O2 Thin Films

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References (67)

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Title: Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films